Explores thermo-mechanical noise in micro and nanosystems, covering spectral density, position fluctuation, accelerometers, calibration, and quality factor scaling.
Explores electro-thermo-mechanical systems in micro and nanosystems, covering thermal bimorphs, material properties, actuators, and multiphysics simulations.
Explores scaling laws and applications of electrostatics in MEMS, covering topics like parallel plate capacitors, zipping actuators, and MEMS gyroscopes.