Course

ME-426: Micro/Nanomechanical devices

Summary

In this course we will see an overview of the exciting field of Micro and Nanomechanical systems. We will go over the dfferent scaling laws that dominate the critical parameters, how size affects material properties, how these devices are manufactured, designed and later used.

Lectures

Instructors

Official source

https://edu.epfl.ch/coursebook/en/micro-nanomechanical-devices-ME-426

Moodle Page

http://go.epfl.ch/ME-426

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Summary

Lectures

Instructors

Official source

https://edu.epfl.ch/coursebook/en/micro-nanomechanical-devices-ME-426

Moodle Page

http://go.epfl.ch/ME-426

About this result

Lectures in this course (14)

ME426 - Paper 1 - 2024

ME426 - Paper 2 - 2024

Micro/Nanomechanical Devices: Fabrication Techniques

Explores the fabrication of micro/nanomechanical devices, covering release, selectivity, stiction, deposition, etching, lithography, and growth techniques.

Transduction of the Motion

Explores transduction in N/MEMS, covering force-based and deformation-based methods.

Transduction of Motion: Optical Lever and Interferometer Detection

Explores optical lever and interferometer detection methods for motion transduction in microscale devices.

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