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Course

ME-426: Micro/Nanomechanical devices

Summary

In this course we will see an overview of the exciting field of Micro and Nanomechanical systems. We will go over the dfferent scaling laws that dominate the critical parameters, how size affects material properties, how these devices are manufactured, designed and later used.

Lectures

Instructor

Luis Guillermo Villanueva Torrijo

Guillermo Villanueva is a Tenure Track Assistant Professor at the Ecole Polytechnique Federale de Lausane (EPFL), Switzerland, in the Mechanical Engineering Institute (IGM). Before joining EPFL he was a Marie Curie post-doctoral scholar at DTU (Denmark) and Caltech (California, US); and before a post-doc at EPFL-LMIS1. He received his M.Sc. in Physics in Zaragoza (Spain) and his PhD from the UAB in Barcelona (Spain). Since the start of his PhD (2002), Prof. Villanueva has been active in the fields of NEMS/MEMS for sensing, having expertise from the design and fabrication to the characterization and applicability. He has co-authored more than 75 papers in peer-reviewed journals (h-index of 24 WoK, 32 GoS) and more than 100 contributions to international conferences. He is serving, or has served, on the program committees of IEEE-NEMS, IEEE-Sensors, MNE, IEEE-FCS and Transducers. He is editor of Microelectronic Engineering. He has co-organized MNE2014 and SNC2015; and he is currently co-organizing the short courses at Transducers 2019 and the 16th International Workshop on Nanomechanical Sensors (NMC2019).

Official source

https://edu.epfl.ch/coursebook/en/micro-nanomechanical-devices-ME-426

Moodle Page

http://go.epfl.ch/ME-426

Summary

Lectures

Instructor

Luis Guillermo Villanueva Torrijo

Official source

https://edu.epfl.ch/coursebook/en/micro-nanomechanical-devices-ME-426

Moodle Page

http://go.epfl.ch/ME-426

Lectures in this course (14)

Micro/Nanomechanical Devices: Fabrication Techniques Log in to Mediaspace to watch this video

Explores the fabrication of micro/nanomechanical devices, covering release, selectivity, stiction, deposition, etching, lithography, and growth techniques.

Transduction of the Motion Log in to Mediaspace to watch this video

Explores transduction in N/MEMS, covering force-based and deformation-based methods.

Quality Factor in Resonators Log in to Mediaspace to watch this video

Explores the concept of quality factor in resonators, discussing its efficiency and interaction with the external environment.

Noise and Measurements Log in to Mediaspace to watch this video

Explores electronic, thermomechanical, and amplifier noise, calibration of amplitude, frequency tracking, and system limits.

Transduction of Motion: Optical Lever and Interferometer Detection Log in to Mediaspace to watch this video

Explores optical lever and interferometer detection methods for motion transduction in microscale devices.

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