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Concept

Reactive-ion etching

Related lectures (32)

Silicon Etching Techniques

Explores silicon etching techniques, fabrication of the Utah array, impedance measurements, and active silicon probes for neural recordings.

Dry Etching Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

Wet Etching: Thin Films and Microfabrication MOOC: Micro and Nanofabrication (MEMS)

Explores wet etching processes, including anisotropic and isotropic etching, thin membrane microfabrication, and applications in microfabrication.

Wet Etching: Chemical Reactions and Process Optimization MOOC: Micro and Nanofabrication (MEMS)

Explores the chemical reactions and optimization of isotropic wet etching in Si.

Micro and Nanofabrication

Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.

Dry Etching: Techniques and Equipment MOOC: Micro and Nanofabrication (MEMS)

Explores various dry etching techniques for silicon and the equipment used in the process, including RF plasma sources and HF vapor phase etchers.

Dry Etching of Organic and Metal Films MOOC: Micro and Nanofabrication (MEMS)

Explores anisotropic etching of organic films and Al alloys, emphasizing the role of Al2O3 in Al etching and presenting examples of dry etching processes.

Plasma Physics: Sheaths and Etching MOOC: Plasma Physics: Applications

Explores plasma formation, sheath creation, and plasma etching applications for integrated circuit manufacturing.

Micro and Nanofabrication: Chemical Reactions and Etching Processes

Explores chemical reactions and etching processes in micro and nanofabrication, including Si etching and the formation of porous Si.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Dry Etching Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores dry etching techniques in semiconductor processing, from barrel reactors to modern plasma sources like ICP and ECR.

Ion Beam Etching MOOC: Micro and Nanofabrication (MEMS)

Introduces ion beam etchers, combining physical sputtering with chemical activity.

Wet Etching: Glass and Silicon MOOC: Micro and Nanofabrication (MEMS)

Explores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.

Wet Etching: Crystal Structure and Anisotropy MOOC: Micro and Nanofabrication (MEMS)

Explores silicon crystal structure, anisotropy in etching rates, etch mechanisms, and different etching baths in micro and nanofabrication.

Photonic Crystals: Fabrication Techniques

Delves into the fabrication techniques of photonic crystals, inspired by natural structures like butterfly wings and opal stones.

Wet Etching: Sacrificial Layers MOOC: Micro and Nanofabrication (MEMS)

Covers wet etching of sacrificial layers in micro and nanofabrication, including challenges and solutions for microstructure deformation and stress diagnosis.

Dry etching: fundamentals and applications MOOC: Micro and Nanofabrication (MEMS)

Explores the fundamentals of dry etching in a gas plasma and provides simple rules for choosing dry etchants.

Microfabrication Technologies

Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.

Micro and Nanofabrication: Basics and Techniques MOOC: Micro and Nanofabrication (MEMS)

Covers the basics of micro and nano fabrication techniques for MEMS devices.

Etch Stop Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.