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Concept

Plasma etching

Related publications (29)

Characterization of low-temperature plasmas generated by dielectric barrier discharges for bacterial inactivation

Lorenzo Ibba

Low-temperature plasmas (LTPs) at atmospheric pressure hold great promise for disinfection and sterilization applications. When compared to traditional sterilization technologies like autoclaving, LTPs may offer several benefits, including reduced energy c ...

EPFL2024

Re-design of EU DEMO with a low aspect ratio

Xabier Sarasola Martin

The design point that had been chosen for EU DEMO in 2016 is reviewed here and a modification is proposed with a lower aspect ratio. Previously the same aspect ratio, A, was chosen for EU DEMO as in major tokamak experiments including ITER (A = 3.1), and, ...

Elsevier2024

Hosing of a Long Relativistic Particle Bunch in Plasma

Ambrogio Fasoli, Sun Hee Kim, Patrick Blanchard, Ivo Furno, Yanis Andrebe, Riccardo Agnello, Alban Sublet, Christine Stollberg

Experimental results show that hosing of a long particle bunch in plasma can be induced by wakefields driven by a short, misaligned preceding bunch. Hosing develops in the plane of misalignment, selfmodulation in the perpendicular plane, at frequencies clo ...

Amer Physical Soc2024

Bodily implant microelectrode and bodily implant microelectrode fabrication method

Sandro Carrara, Diego Ghezzi, Gian Luca Barbruni

The present invention concerns a bodily implantable or probe device and microelectrode fabrication method comprising providing at least one silicon substrate including an electronic device or unit; providing, on a first side of the silicon substrate, at le ...

2024

High density lithium niobate photonic integrated circuits

Tobias Kippenberg, Rui Ning Wang, Johann Emmeram Riemensberger, Anat Siddharth, Mikhail Churaev, Nikolai Kuznetsov, Zihan Li, Junyin Zhang, Zelin Tan

Photonic integrated circuits have the potential to pervade into multiple applications traditionally limited to bulk optics. Of particular interest for new applications are ferroelectrics such as Lithium Niobate, which exhibit a large Pockels effect, but ar ...

Nature Portfolio2023

The role of plasma-atom and molecule interactions on power & particle balance during detachment on the MAST Upgrade Super-X divertor

Christian Gabriel Theiler, Kevin Henricus Annemarie Verhaegh

This paper shows first quantitative analysis of the detachment processes in the MAST Upgrade Super-X divertor (SXD). We identify an unprecedented impact of plasma-molecular interactions involving molecular ions (likely D2+ ), resulting in strong ion sinks ...

IOP Publishing Ltd2023

Plasma sputtering of biased electrodes in an oblique magnetic field

Stefano Alberti, Ivo Furno, Alessandro Geraldini

The surface erosion of biased electrodes immersed in a radio frequency (RF) plasma was investigated in oblique magnetic fields ranging from 0.1 T to 3.5 T. The plasma potential and density in the vicinity of the biased electrode have been measured using an ...

IOP Publishing Ltd2023

Gyrokinetic simulation of low-n Alfvenic modes in tokamak HL-2A plasmas

Javier García Hernández, Samuele Mazzi

The turbulence characteristics of plasmas with internal transport barriers in the HL-2A tokamak are analyzed by means of linear gyrokinetic simulations. It is found that turbulence is dominated by the ion temperature gradient (ITG) mode together with large ...

2023

Integrated modelling of neon impact on JET H-mode core plasmas

Yann Camenen, Michele Marin

Nuclear fusion reactor plasmas will need to exhaust a significant proportion of energy flux through radiative processes, to enable acceptable divertor loads. This can be obtained by line radiation from impurities, injected from the plasma edge. There are h ...

IOP Publishing Ltd2023

Development of the self-modulation instability of a relativistic proton bunch in plasma

Ambrogio Fasoli, Sun Hee Kim, Ivo Furno, Patrick Blanchard, Ana Francisca Leal Silva Soares, Yanis Andrebe, Riccardo Agnello, Samuel Rey-Mermet, Christine Stollberg, Alban Sublet

Self-modulation is a beam-plasma instability that is useful to drive large-amplitude wakefields with bunches much longer than the plasma skin depth. We present experimental results showing that, when increasing the ratio between the initial transverse size ...

2023

Status of SPIDER beam source after the first 3.5 years of operation

Basile Marie Jacques Pouradier Duteil

SPIDER is the negative ion source testbed for ITER neutral beam injector. It is currently the largest negative ion source ever built, equipped with a 100 keV accelerator, aiming at producing a negative ion beam with an extracted current density in hydrogen ...

2023

Plasma-Assisted Hybrid Vapour Deposition Technology for Thin Film Fabrication

Caroline Hain

Continuous development of thin film deposition technologies is essential for the fabrication of films that meet the specific requirements of their target applications and working conditions. Therefore, it is necessary to increase the number of accessible a ...

EPFL2023

Investigation of femtosecond laser-enabled 3D micro-infiltration processes

Enrico Casamenti

In the last decades, the femtosecond laser micromachining of glass has attracted a lot of attention due to its three-dimensional manufacturing ability and flexibility both in terms of compatible substrates and modification types. Yet, to fully unravel its ...

EPFL2022

From pulsed-DCMS and HiPIMS to microwave plasma-assisted sputtering: Their influence on the properties of diamond-like carbon films

Aïcha Hessler-Wyser, Johann Michler, Caroline Hain

The fabrication of high-hardness non-hydrogenated diamond-like carbon (DLC) via standard magnetron sputtering (MS) is often hindered by the low sputtering yields and ionisation rates of carbon, therefore investigations into pulsed alternatives of MS, else ...

ELSEVIER SCIENCE SA2022

Understanding the mechanisms of non-thermal plasma treatments on seeds

Alexandra Waskow

The motivation driving plasma-seed treatment research is the renewed importance of sustainable, eco-friendly agriculture. There is a constant interest in finding alternatives to minimize resource use and environmental degradation, while ensuring healthy se ...

EPFL2022

Vlasov simulation of the emissive plasma sheath with energy-dependent secondary emission coefficient and improved modeling for dielectric charging effects

Guang-Yu Sun

A one-dimensional Vlasov-Poisson simulation code is employed to investigate the plasma sheath considering electron-induced secondary electron emission (SEE) and backscattering. The SEE coefficient is commonly treated as constant in a range of plasma simula ...

FRONTIERS MEDIA SA2022

Microwave plasma-assisted reactive HiPIMS of InN films: Plasma environment and material characterisation

Aïcha Hessler-Wyser, Johann Michler, Jonathan Emanuel Thomet, Caroline Hain

This work focuses on the low temperature fabrication process of InN thin films via microwave plasma-assisted reactive high power impulse magnetron sputtering (MAR-HiPIMS). The influence of microwave plasma on the HiPIMS discharge process at various nitroge ...

ELSEVIER SCIENCE SA2022

A self-consistent multi-component model of plasma turbulence and kinetic neutral dynamics for the simulation of the tokamak boundary

Paolo Ricci

A self-consistent model is presented for the simulation of a multi-component plasma in the tokamak boundary. A deuterium plasma is considered, with the plasma species that include electrons, deuterium atomic ions and deuterium molecular ions, while the deu ...

IOP Publishing Ltd2022

Demonstrating and Unraveling a Controlled Nanometer-Scale Expansion of the Vacancy Defects in Graphene by CO2

Kumar Varoon Agrawal, Luis Francisco Villalobos Vazquez de la Parra, Kuang-Jung Hsu, Mojtaba Chevalier

A controlled manipulation of graphene edges and vacancies is desired for molecular separation, sensing and electronics applications. Unfortunately, available etching methods always lead to vacancy nucleation making it challenging to control etching. Herein ...

Wiley-VCH Verlag GmbH2022

Comparison of JET-C DD neutron rates independently predicted by the ASCOT and TRANSP Monte Carlo heating codes

Henri Weisen

Simulations of the DD neutron rates predicted by the ASCOT and TRANSP Monte Carlo heating codes for a diverse set of JET-C (JET with carbon plasma facing components) plasmas are compared. A previous study (Weisen et al 2017 Nucl. Fusion 57 076029) of this ...

IOP Publishing Ltd2022