Mediaspace scheduled maintenance: Aug 25, 2026 07:00 - 12:00 AM. During this time, videos will be temporarily unavailable. Check status updates.

Concept

Microlithography

Related courses (7)

MICRO-332: Microfabrication practicals

The goal of this course is to introduce students to the practical aspects of some basic micro-fabrication techniques. ...

MICRO-530: Nanotechnology

This course gives the basics for understanding nanotechnology from an engineer's perspective: physical background, materials aspects and scaling laws, fabrication and imaging of nanoscale devices. ...

MICRO-501: MEMS Actuator practicals

The goal of this practical work is to create thermal micro-actuators consisting of micro-cantilevers made out of silicon dioxide and covered by chromium meander-shaped electrical tracks and contact pads. ...

MICRO-621: MOOC: Micro and Nanofabrication (MEMS)

Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen. This MOOC will not only explain the basics of microfabrication but ...

MICRO-605: Optical MEMS and micro-optics

Micro-optics and Optical MEMS let us shape light with unmatched precision and speed. From fiber networks to LIDAR, they drive innovation in compact systems. MICRO 605 takes you from core principles to breakthrough applications in this fast-evolving field. ...

MICRO-534: Advanced MEMS & microsystems

In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications. ...

MICRO-431: Materials and technology of microfabrication

The student will learn procedures and applications of modern microfabrication technologies, as practiced in a clean room environment, in particular modern techniques that go beyond the classical steps of deposition, lithography and etching, with a focus on ...