Course

MICRO-431: Materials and technology of microfabrication

Summary

The student will learn procedures and applications of modern microfabrication technologies, as practiced in a clean room environment, in particular modern techniques that go beyond the classical steps of deposition, lithography and etching, with a focus on materials and multidisciplinarity.

Lectures

Instructors

Official source

https://edu.epfl.ch/coursebook/en/materials-and-technology-of-microfabrication-MICRO-431

Moodle Page

http://go.epfl.ch/MICRO-431

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Summary

Lectures

Instructors

Official source

https://edu.epfl.ch/coursebook/en/materials-and-technology-of-microfabrication-MICRO-431

Moodle Page

http://go.epfl.ch/MICRO-431

About this result

Lectures in this course (14)

Deep Reactive Ion Etching: High Aspect Ratio Structures Log in to Mediaspace to watch this video

Explores deep reactive ion etching for high aspect ratio structures and the Bosch process.

Micromachining Technology: Safety Concepts and Applications Log in to Mediaspace to watch this video

Explores micromachining technology for weapon systems, focusing on safety concepts and stress control in PolySi layers.

Glass Microfabrication by Wet Etching Log in to Mediaspace to watch this video

Explores glass microfabrication using wet etching with hydrofluoric acid, covering etching mechanisms, additives impact, and surface effects.

Glass Microfabrication: Mechanical Structuring Log in to Mediaspace to watch this video

Explores glass microfabrication techniques, including precision machining and ultrasonic machining, focusing on mechanical properties and fracture behavior.

Micro-Powder Blasting in Microfabrication Log in to Mediaspace to watch this video

Covers the development of micro-powder blasting in microfabrication for flat panel displays.

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