Publication

Design and fabrication of a novel centimeter scale three dimensional silicon tip, tilt and piston mirror mechanism

Publications associées (27)

Numerical Simulation of the Semi-Rigid Behaviour of Integrally Attached Timber Folded Surface Structures

Yves Weinand, Andrea Stitic, Anh Chi Nguyen, Aryan Rezaei Rad

Timber folded surface structures assembled using semi-rigid multiple tab and slot joints (MTSJ) have been shown to form feasible structural systems with high load bearing potential. However, for their further development and use on large building scales, a ...

2019

Crystallization of gas-selective nanoporous graphene by competitive etching and growth: a modeling study

Kumar Varoon Agrawal, Soumajit Dutta

A robust synthesis methodology for crystallizing nanoporous single-layer graphene hosting a high density of size-selective nanopores is urgently needed to realize the true potential of two-dimensional membranes for gas separation. Currently, there are no c ...

Nature Research2019

Enhancement of optical quality factor by thermal annealing of single crystal diamond micro-resonators

Niels Quack, Marcell Kristof Kiss, Teodoro Graziosi, Sichen Mi

We report on the increase in optical quality factor of a suspended single crystal diamond micro-disk resonator by thermal annealing. The resonators are fabricated by Deep Reactive Ion Etching (DRIE) to obtain circular pillars in bulk single crystal diamond ...

IEEE2018

Single crystal diamond micro-disk resonators by focused ion beam milling

Niels Quack, Marcell Kristof Kiss, Teodoro Graziosi, Sichen Mi

We report on single crystal diamond micro-disk resonators fabricated in bulk chemical vapor deposition diamond plates (3 mm x 3 mm x 0.15 mm) using a combination of deep reactive ion etching and Focused Ion Beam (FIB) milling. The resulting structures are ...

2018

Monolithic Fabrication of Silicon Nanowires Bridging Thick Silicon Structures

Yusuf Leblebici, Oliver Peric, Davide Sacchetto, Zuhal Tasdemir

A monolithic process is developed for the fabrication of Si nanowires within thick Si substrates. A combination of anisotropic etch and sidewall passivation is utilized to protect and release Si lines during the subsequent deep etch. An etch depth of 10 mu ...

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2018

Pattern formation in thin liquid films: from coating-flow instabilities to microfluidic droplets

Gioele Mariano Nicolò Balestra

Nature and technical applications abound with thin viscous flows, ranging from the lava flow on volcanoes to the lubricating layer around confined bubbles in the microchannels of Lab-on-a-Chip devices. Countless are the examples where coating flows arise i ...

EPFL2018

Photoinitiator-free Laser Fabrication of Ultra-compact, Low-loss Waveguides in Polydimethylsiloxane

Demetri Psaltis, Christophe Moser, Ye Pu, Giulia Panusa, Jieping Wang

Owing to its excellent elasticity, wide spectral range of transparency, and outstanding chemical and thermal stability, polydimethylsiloxane (PDMS) is an elastomer of great technological importance, being widely used in the fabrication of microfluidic and ...

SPIE-INT SOC OPTICAL ENGINEERING2018