Publication

Leveraging wafer-level manufacturing process limitations to increase large scale fused silica microlens array uniformity

Publications associées (30)

Variable-height microfluidic channels for accurate immobilization of C. elegans worms by using a single dry etching step

Martinus Gijs, Hüseyin Baris Atakan, Rongrong Xiang

We present an aspect ratio dependent etching (ARDE) method, utilizing the Bosch dry etching process of silicon, to create the optimal silicon master microstructures for replication of polydimethylsiloxane (PDMS) microchannels that allow immobilizing C. ele ...

2018

On the Limits of Precision Glass Molding for Diffractive Optical Elements

Karin Prater

Diffractive optical elements (DOEs) consist of surface reliefs with dimensions in the micrometer range and nanometer precision. Two technologies dominate: Elements replicated in plastic and directly microfabricated elements in fused silica. Plastic DOEs ar ...

EPFL2017

Near-field characterization of Bloch surface waves based 2D optical components

Richa Dubey

Bloch surface waves (BSWs) are surface electromagnetic modes that propagate at the interface between a multilayer substrate and a homogeneous external medium. The optical field of the surface mode is confined near the surface of the multilayer. This vertic ...

EPFL2017

Novel manufacturing methods for optical antennas : controlling light down to the single nanometer scale

Valentin Flauraud

The resonant excitation of free electrons in metallic nanostructures enables extreme near field intensities along with a deep sub-wavelength localization of the electromagnetic energy. This has been exploited to enhance light-matter interaction down to the ...

EPFL2017

Scaling effect and its impact on wavelength-scale microlenses

Hans Peter Herzig, Myun Sik Kim, Toralf Scharf

We revisit the scaling laws in micro-optical systems to highlight new phenomena arising beyond a conventional optical regime, especially when the size of the system approaches to the operational wavelength. Our goal is to visualize the impact of the scalin ...

Spie-Int Soc Optical Engineering2017

Transition of optical regime in miniaturized optical systems: light interactions beyond the refraction limit

Hans Peter Herzig, Myun Sik Kim, Toralf Scharf

We investigate the transition of optical regimes of miniaturized optical systems using two canonical examples, where the refraction of light limits the system performance. A ball-lens and a solid immersion lens (SIL) are considered, whose refractive respon ...

Spie-Int Soc Optical Engineering2016

Refraction limit of miniaturized optical systems: a ball-lens example

Hans Peter Herzig, Wilfried Noell, Roland Andreas Bitterli, Myun Sik Kim, Toralf Scharf

We study experimentally and theoretically the electromagnetic field in amplitude and phase behind ball-lenses across a wide range of diameters, ranging from a millimeter scale down to a micrometer. Based on the observation, we study the transition between ...

Optical Society of America2016

Design of periodic nano- and macro-scale textures for high-performance thin-film multi-junction solar cells

Christophe Ballif, Franz-Josef Haug, Etienne Antoine Julien Moulin

Surface textures in thin-film silicon multi-junction solar cells play an important role in gaining the photocurrent of the devices. In this paper, a design of the textures is carried out for the case of amorphous silicon/micro-crystalline silicon (a-Si:H/m ...

Iop Publishing Ltd2016

Array imaging system for lithography

Wilfried Noell, Toralf Scharf, Raoul Kirner

We present an integrated array imaging system based on a stack of microlens arrays. The microlens arrays are manufactured by melting resist and reactive ion etching (RIE) technology on 8'' wafers (fused silica) and mounted by wafer-level packaging (WLP)(1) ...

Spie-Int Soc Optical Engineering2016

Hybrid PDMS/glass microfluidics for high resolution imaging and application to sub-wavelength particle trapping

Romuald Houdré, Nicolas Maxime André Descharmes, Mario Lucien Henri Tonin

We demonstrate the fabrication of a hybrid PDMS/glass microfluidic layer that can be placed on top of non-transparent samples and allows high-resolution optical microscopy through it. The layer mimics a glass coverslip to limit optical aberrations and can ...

Royal Society of Chemistry2016