Leveraging wafer-level manufacturing process limitations to increase large scale fused silica microlens array uniformity

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Refractive microlenses are nowadays widely used in optical systems. Characterizing their surface is essential to ensure their quality and to optimize their fabrication process. This is realized by optical surface profilers thanks to their vertical resoluti ...

Diffractive optical elements (DOEs) consist of surface reliefs with dimensions in the micrometer range and nanometer precision. Two technologies dominate: Elements replicated in plastic and directly microfabricated elements in fused silica. Plastic DOEs ar ...

Camera calibration refers to the modeling of the relationship between the coordinates of object points and their projections on the image plane. This is usually done by parametric models that describe the physical properties of the lens systems and camera ...

Bloch surface waves (BSWs) are surface electromagnetic modes that propagate at the interface between a multilayer substrate and a homogeneous external medium. The optical field of the surface mode is confined near the surface of the multilayer. This vertic ...

A Koehler integrator device (10) comprises a collimating lens (11) being arranged for collimating a light field created by an incoherent or partially coherent light source, a pair of planar first and second micro-lens arrays (12, 13) being arranged for rel ...

Layer-by-layer manufacturing of composite mechanisms allows fast and cost-effective fabrication of customized robots in millimeter and centimeter scales which is promising for research fields that rely on frequent and numerous physical iterations. Due to t ...

The resonant excitation of free electrons in metallic nanostructures enables extreme near field intensities along with a deep sub-wavelength localization of the electromagnetic energy. This has been exploited to enhance light-matter interaction down to the ...

The optical performance of refractive plano-convex microlenses is mainly related to the quality of their (a)spherical surface. An efficient tolerancing of this surface is a key step towards the manufacturing of high quality microlenses. However, we demonst ...

We revisit the scaling laws in micro-optical systems to highlight new phenomena arising beyond a conventional optical regime, especially when the size of the system approaches to the operational wavelength. Our goal is to visualize the impact of the scalin ...

The uniformity of large microlens arrays in Fused Silica is governed by the production process. It comprises photolithographic patterning of a spin-coated layer of photoresist on a 200mm wafer with a molten resist reflow process and subsequent dry etching. ...

We investigate the transition of optical regimes of miniaturized optical systems using two canonical examples, where the refraction of light limits the system performance. A ball-lens and a solid immersion lens (SIL) are considered, whose refractive respon ...

In this work we study the evolution of the photonic nanojet (PNJ) phenomenon as the ratio of the sphere's diameter over the illumination wavelength changes, for microspheres with diameters from 2 mu m to 100 mu m. We measure the focal point position by usi ...

We study experimentally and theoretically the electromagnetic field in amplitude and phase behind ball-lenses across a wide range of diameters, ranging from a millimeter scale down to a micrometer. Based on the observation, we study the transition between ...

We report on a innovative Lab on Fiber (LOF) dosimeter for ionizing radiation monitoring at ultra-high doses. The new dosimeter consists in a metallo-dielectric resonator at sub-wavelength scale supporting localized surface plasmon resonances realized on t ...

Surface textures in thin-film silicon multi-junction solar cells play an important role in gaining the photocurrent of the devices. In this paper, a design of the textures is carried out for the case of amorphous silicon/micro-crystalline silicon (a-Si:H/m ...

In this study, we apply interferometric microscopy to study the phase, alongside the intensity, of the light field transmitted through a wide variety of samples. Additionally, we conduct those interferometric measurements at different wavelengths within th ...

Metasurfaces based on resonant subwavelength photonic structures enable novel ways of wavefront control and light focusing, underpinning a new generation of flat-optics devices. Recently emerged all-dielectric asymmetric metasurfaces, composed of arrays of ...

We present an integrated array imaging system based on a stack of microlens arrays. The microlens arrays are manufactured by melting resist and reactive ion etching (RIE) technology on 8'' wafers (fused silica) and mounted by wafer-level packaging (WLP)(1) ...

We demonstrate the fabrication of a hybrid PDMS/glass microfluidic layer that can be placed on top of non-transparent samples and allows high-resolution optical microscopy through it. The layer mimics a glass coverslip to limit optical aberrations and can ...

Leveraging wafer-level manufacturing process limitations to increase large scale fused silica microlens array uniformity

Chattez avec Graph Search

Correction of spherical surface measurements by confocal microscopy

On the Limits of Precision Glass Molding for Diffractive Optical Elements

Camera Calibration Models and Methods for Corridor Mapping with UAVs

Near-field characterization of Bloch surface waves based 2D optical components

Koehler integrator device and application thereof in a multi-focal confocal microscope

Stretchable Kirigami Components for Composite Meso-Scale Robots

Novel manufacturing methods for optical antennas : controlling light down to the single nanometer scale

Specification of aspherical surfaces used as refractive elements in micro-optical systems

Scaling effect and its impact on wavelength-scale microlenses

Improvements on the uniformity of large-area microlens arrays in Fused Silica

Transition of optical regime in miniaturized optical systems: light interactions beyond the refraction limit

Are Photonic Nanojets Achromatic?

Refraction limit of miniaturized optical systems: a ball-lens example

Innovative Lab on Fiber dosimeters for ionizing radiation monitoring at ultra-high doses

Design of periodic nano- and macro-scale textures for high-performance thin-film multi-junction solar cells

Phase resolved characterization of nanoscale features in optical microstructures

Ultrasensitive hyperspectral imaging and biodetection enabled by dielectric metasurfaces

Array imaging system for lithography

Hybrid PDMS/glass microfluidics for high resolution imaging and application to sub-wavelength particle trapping