Thermal scanning probe lithography (t-SPL) is an advanced lithography technique in
which a heated atomic force microscope tip locally modifies a sample material. Due to
the nanometer-sized tip apex diameter, t-SPL enables patterning of sub-10 nm structures ...
A transparent polymer film with embedded micro mirrors is developed, and it can be attached to a window glass pane for daylighting, improving visual comfort and reducing cooling load in buildings by redirecting sunlight. Despite existing cutting-edge techn ...
We present and discuss Talbot mask-aligner lithography, relying on a continuous wave laser emitting at 193nm for the illumination. In this source, a diode laser at 772nm is amplified by a tapered amplifier in master-oscillator power-amplifier configuration ...
Thermal scanning probe lithography is an emerging nanofabrication technique for rapid prototyping of arbitrary topographies in thermally sensitive resist. This feature, paired to the recent advances in dry plasma etching techniques, allows the fabrication ...
