Fabrication of plasmonic structures with well-controlled nanometric features: a comparison between lift-off and ion beam etching

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The fabrication of defined and high-quality metal nanostructures is an ongoing topic of research. Direct-write deposition of copper nanostructures is of great value for many fields of research and industrial applications. Focused electron beam induced depo ...

The nitrogen-vacancy (NV) center in diamond is a powerful and versatile quantum sensor for diverse quantities. In particular, relaxometry (or T1), can be used to detect magnetic noise at the nanoscale. For experiments with single NV centers the analysis of ...

Electron beam-generated plasmas (EBPs) have been used to modify the surface properties. In certain applications, EBPs are transversely confined and their properties are of value to the treatment. In this paper, the characteristics of an electron beam-gener ...

Atomically thin materials, such as graphene and transition metal dichalcogenides, are promising candidates for future applications in micro/nanodevices and systems. For most applications, functional nanostructures have to be patterned by lithography. Devel ...

New types of metamaterials and architectured material require metallic materials with precise structural design in the microscale. However, additivemanufacturing of metallic structures in themicroscale has proven difficult, as the demand for the material q ...

We generate correlated pairs of free electrons and cavity photons by sending an electron beam across a photonic microresonator and filtering temporal coincidences. We further characterize the pairs analogue to a heralded single photon source. ...

We demonstrate the design, fabrication, and experimental characterization of near-field binary phase transmission diffractive optical elements (DOEs) in single crystal diamond. Top-hat and arbitrary pattern DOE beam shapers were numerically optimized using ...

Grayscale electron beam lithography (g-EBL) is a fabrication technique that allows for tunable control of resist topography. In most cases, the height of the structures is in the submicron regime. Here, we present an extensive experimental characterization ...

We report on the design, fabrication and optical performance of gain mirrors in single crystal diamond substrates for vertical external cavity surface emitting lasers (VECSELs). VECSELs have gained attention recently due to their potential for high emissio ...

In this paper, we demonstrate the fabrication and characterization of lithium niobate (LN) based Lamb wave mode (S0 and SH0) resonators that address the stringent requirements of RF filtering for modern communication systems. The devices consist of a 400 n ...

Silicon nanowire-based sensors find many applications in micro- and nano-electromechanical systems, thanks to their unique characteristics of flexibility and strength that emerge at the nanoscale. This work is the first study of this class of micro- and na ...

In proximity mask aligner photolithography, diffraction of light at the mask pattern is the predominant source for image shape distortions such as line end shortening and corner rounding. One established method to mitigate the impact of diffraction is opti ...

A novel fabrication method based on the local sputtering of photoresist sidewalls during ion beam etching is presented. This method allows for the manufacture of three-dimensional multimaterial nanostructures at the wafer scale in only four process steps. ...

Printing gold alloys parts is a challenge due to the high reflectivity and thermal conductivity of these materials. Recent studies show an improvement in printing gold using the Laser Powder Bed Fusion (L-PBF) process; however, the impact of the A1 -> L1(0 ...

Fabrication of plasmonic structures with well-controlled nanometric features: a comparison between lift-off and ion beam etching

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Electron Beam Induced Copper Deposition from Carboxylate Precursors and the Study of Underlying Growth Mechanisms

Optimizing Data Processing for Nanodiamond Based Relaxometry

Characterization of transversely confined electron beam-generated plasma using two-dimensional particle-in-cell simulations

Thermomechanical Nanocutting of 2D Materials

Template-assisted electrodeposition of nickel and nickel copper 3D microcomponents

Photon Fock State Generation in Photonic Microresonators

Diffractive optical elements in single crystal diamond

Grayscale e-beam lithography: Effects of a delayed development for well-controlled 3D patterning

Single crystal diamond gain mirrors for high performance vertical external cavity surface emitting lasers

Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators

Real- and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (epsilon(044)) and tilt of suspended monolithic silicon nanowire structures

Computational rule-based approach for corner correction of non-Manhattan geometries in mask aligner photolithography

Ion beam etching redeposition for 3D multimaterial nanostructure manufacturing

Understanding variant selection and texture in additively manufactured red-gold alloys