Fabrication and characterization of AlScN-based trampoline resonators for super-resolution microscopy

This report explores the fabrication and characterization of Aluminum Scandium Nitride (AlScN)-based trampoline resonators designed for nanomechanical and photothermal sensing in super resolution microscopy. The piezoelectric transduction method minimizes heating and enhances signal efficiency, making it a potential alternative solution in this field. By replacing Aluminum Nitride (AlN) with AlScN, the project achieves significant improvements in electromechanical coupling and sensitivity while also attempting to modeling fully the structure behavior. Measurements confirmed functional actuation and detection, as well as a Q-factor superior to 1000 and a minimum Allan deviation of 10−6. Challenges, including mechanical deformation, wet-etching inconsistencies, and simulation inaccuracies, were identified, with proposed solutions to refine the process and improve future operating processes. These findings establish a foundation for further development and improvements for an AlScN-based trampoline resonator.