Publication

Fabrication and characterization of AlScN-based trampoline resonators for super-resolution microscopy

2025

Abstract

This report explores the fabrication and characterization of Aluminum Scandium Nitride (AlScN)-based trampoline resonators designed for nanomechanical and photothermal sensing in super resolution microscopy. The piezoelectric transduction method minimizes heating and enhances signal efficiency, making it a potential alternative solution in this field. By replacing Aluminum Nitride (AlN) with AlScN, the project achieves significant improvements in electromechanical coupling and sensitivity while also attempting to modeling fully the structure behavior. Measurements confirmed functional actuation and detection, as well as a Q-factor superior to 1000 and a minimum Allan deviation of 10−6. Challenges, including mechanical deformation, wet-etching inconsistencies, and simulation inaccuracies, were identified, with proposed solutions to refine the process and improve future operating processes. These findings establish a foundation for further development and improvements for an AlScN-based trampoline resonator.

Official source

https://infoscience.epfl.ch/entities/publication/849d13f4-df94-453f-8584-356bef910eb7

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2025

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/849d13f4-df94-453f-8584-356bef910eb7

About this result

Related concepts (26)

Super-resolution microscopy

Super-resolution microscopy is a series of techniques in optical microscopy that allow such images to have resolutions higher than those imposed by the diffraction limit, which is due to the diffraction of light. Super-resolution imaging techniques rely on the near-field (photon-tunneling microscopy as well as those that use the Pendry Superlens and near field scanning optical microscopy) or on the far-field.

Microscopy

Microscopy is the technical field of using microscopes to view objects and areas of objects that cannot be seen with the naked eye (objects that are not within the resolution range of the normal eye). There are three well-known branches of microscopy: optical, electron, and scanning probe microscopy, along with the emerging field of X-ray microscopy. Optical microscopy and electron microscopy involve the diffraction, reflection, or refraction of electromagnetic radiation/electron beams interacting with the specimen, and the collection of the scattered radiation or another signal in order to create an image.

Confocal microscopy

Confocal microscopy, most frequently confocal laser scanning microscopy (CLSM) or laser scanning confocal microscopy (LSCM), is an optical imaging technique for increasing optical resolution and contrast of a micrograph by means of using a spatial pinhole to block out-of-focus light in image formation. Capturing multiple two-dimensional images at different depths in a sample enables the reconstruction of three-dimensional structures (a process known as optical sectioning) within an object.