Fabrication of MEMS pressure sensor on thin film membranes

In the context of this semester project, the focus is placed exclusively on the design, fabrication, and testing of the thin-film membrane used for pressure sensing within a multi-parameter MEMS platform. Particular attention is given to the influence of membrane thickness, diameter, material stack, and residual stresses on mechanical stability and sensor performance. Given the need to operate at high pressures while maintaining measurement sensitivity, the membrane design must balance mechanical robustness and sensitivity with adequate deflection amplitude. It is important to identify the factors that influence the success or failure of the process to fine-tune its parameters and ensure an optimized version of the overall process of the gas sensor.