Publication

Fabrication of MEMS pressure sensor on thin film membranes

2026

Abstract

In the context of this semester project, the focus is placed exclusively on the design, fabrication, and testing of the thin-film membrane used for pressure sensing within a multi-parameter MEMS platform. Particular attention is given to the influence of membrane thickness, diameter, material stack, and residual stresses on mechanical stability and sensor performance. Given the need to operate at high pressures while maintaining measurement sensitivity, the membrane design must balance mechanical robustness and sensitivity with adequate deflection amplitude. It is important to identify the factors that influence the success or failure of the process to fine-tune its parameters and ensure an optimized version of the overall process of the gas sensor.

Official source

https://infoscience.epfl.ch/entities/publication/7f06cc1d-8023-4f35-a2d6-3e6680923d88

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2026

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/7f06cc1d-8023-4f35-a2d6-3e6680923d88

About this result

Related concepts (28)

Membrane

A membrane is a selective barrier; it allows some things to pass through but stops others. Such things may be molecules, ions, or other small particles. Membranes can be generally classified into synthetic membranes and biological membranes. Biological membranes include cell membranes (outer coverings of cells or organelles that allow passage of certain constituents); nuclear membranes, which cover a cell nucleus; and tissue membranes, such as mucosae and serosae.

Synthetic membrane

An artificial membrane, or synthetic membrane, is a synthetically created membrane which is usually intended for separation purposes in laboratory or in industry. Synthetic membranes have been successfully used for small and large-scale industrial processes since the middle of twentieth century. A wide variety of synthetic membranes is known. They can be produced from organic materials such as polymers and liquids, as well as inorganic materials. The most of commercially utilized synthetic membranes in separation industry are made of polymeric structures.

Semipermeable membrane

Semipermeable membrane is a type of biological or synthetic, polymeric membrane that will allow certain molecules or ions to pass through it by osmosis. The rate of passage depends on the pressure, concentration, and temperature of the molecules or solutes on either side, as well as the permeability of the membrane to each solute. Depending on the membrane and the solute, permeability may depend on solute size, solubility, properties, or chemistry. How the membrane is constructed to be selective in its permeability will determine the rate and the permeability.

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Fabrication of MEMS pressure sensor on thin film membranes

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