High reflectivity airgap distributed Bragg reflectors realized by wet etching of AlInN sacrificial layers

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This paper presents a fabrication process for arrays of high-aspect-ratio micropillar electrodes, which are freestanding 3D structures that feature metal sidewalls connected to passivated planar wires. Facing vertical electrodes are considered to be a key ...

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Etching an ensemble of vacancy defects (nanopores) in single-layer graphene (SLG) to obtain a high density of nanopores with an effective size that enables high-performance gas sieving is challenging. This is because nanopore nucleation and expansion are u ...

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We present and characterize an organic–inorganic hybrid sol–gel material, phenyl-bridged polysilsesquioxane (ph-PSQ), for use as a new highresolution resist for electron beam lithography (EBL). The resist has a unique characteristic as the only positive to ...

We present here, for the first time, a fabrication technique that allows manufacturing scallop free, non-tapered, high aspect ratio in through-silicon vias (TSVs) on silicon wafers. TSVs are among major technology players in modern high-volume manufacturin ...

In this work, nanosphere lithography was integrated with standard microfabrication for the wafer-scale fabrication of silicon nitride (SiN) membranes with arrays of submicrometer holes. A monolayer of polystyrene (PS) beads with a mean diameter of 428 or 5 ...

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Crystal phase engineering is an exciting pathway to enhance the properties of conventional semiconductors. Metastable SiGe presents a direct band gap well suited for optical devices whereas wurtzite (WZ) phosphide alloys enable efficient light emission in ...

High reflectivity airgap distributed Bragg reflectors realized by wet etching of AlInN sacrificial layers

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Metal-coated silicon micropillars for freestanding 3D-electrode arrays in microchannels

Optimizing Parylene C Adhesion for MEMS Processes: Potassium Hydroxide Wet Etching

Systematic design of millisecond gasification reactor for the incorporation of gas-sieving nanopores in single-layer graphene

Multi-channel nanowire devices for efficient power conversion

Memristive-Biosensors: A New Detection Method by Using Nanofabricated Memristors

Phenyl-bridged polysilsesquioxane positive and negative resist for electron beam lithography

The Michelangelo step: removing scalloping and tapering effects in high aspect ratio through silicon vias

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

WSe2/SnSe2 vdW heterojunction Tunnel FET with subthermionic characteristic and MOSFET co-integrated on same WSe2 flake

Crystal Phase Engineering in III-V Semiconductor Films: from Epitaxy to Devices