Lithium Niobate - Silicon wafer Bonding

Lithium Niobate (LN) can be bought as wafers, and there are also industrial wafers of Si or SiO2 with a thin film of LiNbO3 on it. However Lithium Niobate is anisotropic and it is useful to build the LN thin film in house in order to chose its orientation and thickness, which is fixed in industry. The main objective of this project is to achieve the bonding of an insulator wafer (380 μm of Si surrounded by 4 μm of SiO2) with a LN wafer. Then in a second time the bonded wafer can be grinded down and then flattened through chemical mechanical polishing to obtain a LN layer of any thickness and orientation on the insulator wafer.