Publication

Lithium Niobate - Silicon wafer Bonding

2024

Abstract

Lithium Niobate (LN) can be bought as wafers, and there are also industrial wafers of Si or SiO2 with a thin film of LiNbO3 on it. However Lithium Niobate is anisotropic and it is useful to build the LN thin film in house in order to chose its orientation and thickness, which is fixed in industry. The main objective of this project is to achieve the bonding of an insulator wafer (380 μm of Si surrounded by 4 μm of SiO2) with a LN wafer. Then in a second time the bonded wafer can be grinded down and then flattened through chemical mechanical polishing to obtain a LN layer of any thickness and orientation on the insulator wafer.

Official source

https://infoscience.epfl.ch/entities/publication/08f8bef9-44df-43af-9840-96b73702ca21

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2024

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/08f8bef9-44df-43af-9840-96b73702ca21

About this result

Related concepts (32)

Wafer (electronics)

In electronics, a wafer (also called a slice or substrate) is a thin slice of semiconductor, such as a crystalline silicon (c-Si), used for the fabrication of integrated circuits and, in photovoltaics, to manufacture solar cells. The wafer serves as the substrate for microelectronic devices built in and upon the wafer. It undergoes many microfabrication processes, such as doping, ion implantation, etching, thin-film deposition of various materials, and photolithographic patterning.

Project

A project is any undertaking, carried out individually or collaboratively and possibly involving research or design, that is carefully planned to achieve a particular goal. An alternative view sees a project managerially as a sequence of events: a "set of interrelated tasks to be executed over a fixed period and within certain cost and other limitations". A project may be a temporary (rather than a permanent) social system (work system), possibly staffed by teams (within or across organizations) to accomplish particular tasks under time constraints.

Project management

Project management is the process of leading the work of a team to achieve all project goals within the given constraints. This information is usually described in project documentation, created at the beginning of the development process. The primary constraints are scope, time, and budget. The secondary challenge is to optimize the allocation of necessary inputs and apply them to meet pre-defined objectives. The objective of project management is to produce a complete project which complies with the client's objectives.

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Lithium Niobate - Silicon wafer Bonding

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