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Xinru Ji

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Publications associées (32)

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Compact, spatial-mode-interaction-free, ultralow-loss, nonlinear photonic integrated circuits

Tobias Kippenberg, Junqiu Liu, Rui Ning Wang, Johann Emmeram Riemensberger, Jijun He, Zheru Qiu, Xinru Ji

Multi-mode waveguides are ubiquitously used in integrated photonics. Although interaction among different spatial waveguide eigenmodes can induce novel nonlinear phenomena, spatial mode interaction is typically undesired. Adiabatic bends, such as Euler ben ...

NATURE PORTFOLIO2022

Efficient mass manufacturing of high-density, ultra-low-loss Si3N4 photonic integrated circuits

Tobias Kippenberg, Rui Ning Wang, Johann Emmeram Riemensberger, Zheru Qiu, Xinru Ji, Yang Liu

Silicon nitride (Si3N4) photonic integrated circuits (PICs) offer significant advantages over traditional silicon photonics, including low loss and superior power handling at optical communication wavelength bands. To facilitate high-density integration an ...

2024

A photonic integrated circuit-based erbium-doped amplifier

Tobias Kippenberg, Junqiu Liu, Rui Ning Wang, Johann Emmeram Riemensberger, Jijun He, Anton Lukashchuk, Zheru Qiu, Xinru Ji

Erbium-doped fiber amplifiers revolutionized long-haul optical communications and laser technology. Erbium ions could provide a basis for efficient optical amplification in photonic integrated circuits but their use remains impractical as a result of insuf ...

American Association for the Advancement of Science2022

An autonomous untethered fast soft robotic insect driven by low-voltage dielectric elastomer actuators

Yves Perriard, Herbert Shea, Yoan René Cyrille Civet, Matthias Imboden, Vito Cacucciolo, Xinru Ji, Xinchang Liu, Xiaobin Ji

Insects are a constant source of inspiration for roboticists. Their compliant bodies allow them to squeeze through small openings and be highly resilient to impacts. However, making subgram autonomous soft robots untethered and capable of responding intell ...

2019

Lithium tantalate photonic integrated circuits for volume manufacturing

Tobias Kippenberg, Johann Emmeram Riemensberger, Mikhail Churaev, Xinru Ji, Zihan Li, Terence Albert Emile Blésin, Chengli Wang, Junyin Zhang, Xi Wang, Chen Yang, Wil Kao, Alisa Davydova

Electro-optical photonic integrated circuits (PICs) based on lithium niobate (LiNbO3) have demonstrated the vast capabilities of materials with a high Pockels coefficient1,2. They enable linear and high-speed modulators operating at complementary metal–oxi ...

2024

Wafer-scale Manufacturing of Ultra-low Loss, High-density Si3N4 Photonic Integrated Circuits

Tobias Kippenberg, Rui Ning Wang, Zheru Qiu, Xinru Ji

We demonstrate Si3N4 photonic integrated circuits featuring ultra-low propagation loss and tight optical confinement, fabricated with a subtractive process. We report an increase in propagation loss in Si3N4 waveguides after exposure to ultraviolet (UV) ir ...

Optical Society of America2023

A fully hybrid integrated erbium-based laser

Tobias Kippenberg, Rui Ning Wang, Johann Emmeram Riemensberger, Zheru Qiu, Xinru Ji, Andrey Voloshin, Yang Liu, Andrea Bancora

Erbium-doped fibre lasers exhibit high coherence and low noise as required for fibre-optic sensing, gyroscopes, LiDAR and optical frequency metrology. Endowing erbium-based gain in photonic integrated circuits can provide a basis for miniaturizing low-nois ...

Nature Publishing Group2024

Protected generation of dissipative Kerr solitons in supermodes of coupled optical microresonators

Tobias Kippenberg, Junqiu Liu, Rui Ning Wang, Johann Emmeram Riemensberger, Mikhail Churaev, Xinru Ji, Alexey Tikan, Aleksandr Tusnin

A photonic dimer composed of two evanescently coupled high-Q microresonators is a fundamental element of multimode soliton lattices. It has demonstrated a variety of emergent nonlinear phenomena, including supermode soliton generation and soliton hopping. ...

AMER ASSOC ADVANCEMENT SCIENCE2022

A Photonic Integrated Circuit-Based Erbium-doped Waveguide Amplifier

Tobias Kippenberg, Junqiu Liu, Rui Ning Wang, Johann Emmeram Riemensberger, Jijun He, Zheru Qiu, Xinru Ji

We demonstrate an erbium-doped waveguide amplifier by erbium ion implantation in Si3N4 photonic integrated circuits, achieving 145 mW on-chip output power and more than 30 dB small-signal gain, which is on par with commercial fiber amplifiers and beyond st ...

IEEE2022

C- and L-band tunable integrated Erbium lasers via scalable manufacturing

Tobias Kippenberg, Zheru Qiu, Xinru Ji, Andrey Voloshin, Grigorii Likhachev, Yang Liu, Simone Bianconi, Xuan Yang

We demonstrate an integrated Erbium-based tunable laser using wafer-scale fabrication and ion implantation of silicon nitride photonic integrated circuits. We achieve single-frequency lasing tunable from 1530 nm to 1621 nm covering nearly the entire optica ...

Optica Publishing Group2025

Lithium Tantalate Photonic Integrated Circuits (Student Paper)

Tobias Kippenberg, Johann Emmeram Riemensberger, Mikhail Churaev, Xinru Ji, Zihan Li, Chengli Wang

We demonstrate a wafer-scale lithium tantalate photonic platform with loss as low as 5.5 dB m(-1). Mach-Zehnder modulators with a 40 GHz electro-optical bandwidth and a 1.96 V center dot cm voltage-length product, along with microresonators supporting diss ...

Springer Nature2024

Photonic-electronic integrated circuit-based coherent LiDAR engine

Edoardo Charbon, Tobias Kippenberg, Anton Lukashchuk, Zheru Qiu, Xinru Ji, Andrey Voloshin, Grigorii Likhachev, Yang Liu, Andrea Bancora, Halil Kerim Yildirim

Chip-scale integration is a key enabler for the deployment of photonic technologies. Coherent laser ranging or FMCW LiDAR, a perception technology that benefits from instantaneous velocity and distance detection, eye-safe operation, long-range, and immunit ...

Nature Portfolio2024

Low-temperature and hydrogen-free silicon dioxide cladding for next-generation integrated photonics

Tobias Kippenberg, Anat Siddharth, Zheru Qiu, Xinru Ji, Zihan Li, Marta Divall

We demonstrate a process for hydrogen-free low-loss silicon oxide (SiO2) films deposited using S iCl4 and O 2 as precursors. A wide low-loss window from 1260 nm to 1625 nm is achieved at a deposition temperature of 300 ◦C, essential for next generation pho ...

Optical Society of America2024

First Demonstration of Erbium -Doped Waveguide Amplifier Enabled Multi-Tb/s (16x1.6T) Coherent Transmission

Tobias Kippenberg, Zheru Qiu, Xinru Ji, Xi Chen

We demonstrate the first EDWA-enabled Terabit-class coherent optical communication with 1.6-Tb/s net bit rate per channel and 16 -channel WDM transmission over 81 -km fiber, proving the potential of such on-chip amplification for future coherent applicatio ...

IEEE2023

High-Energy Mode-Locked Pulses from a Photonic Integrated Mamyshev Oscillator

Jiale Sun, Xurong Li, Zhongshu Liu, Tobias Kippenberg, Jianqi Hu, Zheru Qiu, Xinru Ji, Zihan Li, Grigorii Likhachev, Xuan Yang

Mode-locked lasers (MLLs), capable of generating ultrashort coherent pulses, have been instrumental for numerous applications, including optical frequency metrology, eye surgery, machining, additive manufacturing, imaging and spectroscopy. However, commerc ...

IEEE2025

Full C-band tunable integrated Erbium lasers via wafer-scale fabrication

Tobias Kippenberg, Rui Ning Wang, Anat Siddharth, Zheru Qiu, Xinru Ji

We demonstrate an integrated Erbium-based tunable laser using wafer-scale fabrication and ion implantation of silicon nitride photonic integrated circuits, and achieve single-frequency lasing tunable from 1530 nm to 1575 nm covering the entire optical C-ba ...

Institute of Electrical and Electronics Engineers Inc.2024

A Photonic Integrated High-power Soliton Microcomb Generator

Tobias Kippenberg, Rui Ning Wang, Johann Emmeram Riemensberger, Zheru Qiu, Xinru Ji, Andrey Voloshin

We demonstrate a compact soliton microcomb light source. The soliton is generated from a Kerr microresonator and amplified by an erbium-implanted gain section integrated on the same photonic chip. We achieved an output power of 7.9 mW at a compact device f ...

Optical Society of America2023

Foundry compatible, efficient wafer-scale manufacturing of ultra-low loss, high-density Si3N4 photonic integrated circuits

Tobias Kippenberg, Rui Ning Wang, Johann Emmeram Riemensberger, Zheru Qiu, Xinru Ji

We demonstrate ultra-low propagation loss, lithographic precision, and wafer-scale manufacturing for high-density Si3N4 photonic integrated circuits using an efficient DUV-based subtractive approach. We show a propagation loss as low as 1.4 dB/m at 1.55 µm ...

Optical Society of America2024

Silicon nitride waveguide or photonic integrated circuit fabrication method

Tobias Kippenberg, Xinru Ji

Silicon nitride waveguide fabrication method including providing a substrate including a stress release trench structure, the stress release recess structure being formed in a silicon oxide layer, depositing a silicon nitride material or layer onto the sil ...

2024

Lithium tantalate photonic integrated circuits for high volume manufacturing

Tobias Kippenberg, Johann Emmeram Riemensberger, Mikhail Churaev, Xinru Ji, Zihan Li, Chengli Wang

We demonstrate the first photonic integrated circuit platform using Lithium Tantalate (LiTaO3), achieving waveguides with low losses (5.6 dB m−1), Mach-Zehnder modulators with a 40 GHz electro-optical bandwidth and a 1.96 V · cm voltage-length product, alo ...

Institute of Electrical and Electronics Engineers Inc.2024