Publications de Thomas Kiefer | EPFL Graph Search

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The morphological transition in ultrathin palladium (Pd) films around the percolation threshold and the related transition in hydrogen sensing behavior is investigated.We find that besides the transition from continuous to discontinuous Pd, an intermediate ...

In this paper a nano-molding process using a nature-created master is demonstrated. The eye of night moth Agotis exclamationis having 100 nm-scale structures on a curved surface is used as biomimetic master mold from which nanostructures are replicated ont ...

This work presents the fabrication and characterization of a novel hydrogen-detecting micro-resonator based on the expansion of palladium (Pd) as it is exposed to hydrogen (H2) gas. The working principle of the device has been confirmed and it shows a stro ...

Fast hydrogen sensors based on discontinuous palladium (Pd) ﬁlms on supporting polyimide layers, fabricated by a cost-efﬁcient and full-wafer compatible process, are presented. The ﬁlms, deposited by electron-beam evaporation with a nominal thickness of 1. ...

A hydrogen sensor based on large arrays of nanoswitches in palladium (Pd) is presented. An individual nanoswitch is realized by a suspended Pd/Ti/poly-Si trimorph electrode and a fixed Pd/Ti bottom electrode, which are separated by a vertical nanoscopic ga ...

The hydrogen sensing characteristics of a single nanotrench fabricated by focused ion beam milling (FIB) in an evaporated palladium microwire are presented. In situ atomic force microscopy (AFM) measurements proved that, in the presence of H2, the trench c ...

We present a percolation based model which is suitable for the design of sensors based on highly ordered nanogap arrays. Monte-Carlo simulations and analytical expressions are used to calculate the sensitivity and dynamic range as a function of the topolog ...

Stencil Lithography has been used for the rapid and low cost fabrication of high resolution NIL stamps. The stamps are fabricated by Al deposition through a nanoscale shadow mask and subsequent Si etching. Features down to 50 nm in the stamps have been ach ...

Hydrogen (H2) has raised considerable interest as a future energy carrier in its application to fuel cell driven vehicles, as it is absolutely free of polluting emissions. However, it is flammable in air and difficult to contain, for which reason innovativ ...

This paper describes the fabrication of sub micrometer silicon oxycarbide (SiCO) ceramic structures. The method consists in replicating silicon micro/nanostructures in polydimethylsiloxane (PDMS), followed by a micro/nano molding of liquid polymer derived ...

A hydrogen sensor based on a novel fabrication process that combines the precision of advanced nano-fabrication techniques with a bottom-up process based on electrochemistry is presented. The sensor allows for reliable detection between 0.1% and 100% of H2 ...

The challenging fabrication of sub-100-nm structures with high aspect ratio by UV-nanoimprint lithography (NIL) is addressed in this work. Thermal shrinkage is induced by cooling the structures below room temperature to avoid the issues commonly arising du ...

Thomas Kiefer

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The transition in hydrogen sensing behavior in non-continuous palladium films

Biomimetic soft lithography on curved nanostructured surfaces

Pd-functionalized MEMS resonator for hydrogen gas sensing at ambient pressure

Fast and robust hydrogen sensors based on discontinuous palladium films on polyimide, fabricated on a wafer scale

Large arrays of chemo-mechanical nanoswitches for ultralow-power hydrogen sensing

A single nanotrench in a palladium microwire for hydrogen detection

Design and optimization of nanogap array sensors

Direct fabrication of NIL stamps using Stencil Lithography

Hydrogen sensors based on palladium micro- and nanostructures for fuel cell applications

Sub micrometer ceramic structures fabricated by molding a polymer-derived ceramic

Highly ordered palladium nanodot patterns for full concentration range hydrogen sensing

Direct imprinting of organic-inorganic hybrid materials into high aspect ratio sub-100 nm structures

Very Large Scale Arrays of Chemo-Mechanical Nano-Switches for Ultralow Power Hydrogen Sensing