Publications de Vahid Fakhfouri

Publications associées (12)

Inkjet printing and high aspect ratio structuring for polymer-based micro and nano systems

Inkjet printing of functional materials, photolithography and micromolding are 3 different techniques largely used in the field of micro-electromechanical systems (MEMS) with increasing interest for the fabrication of new devices and the development of new ...

EPFL2008

An Epoxy Photoresist Modified by Luminescent Nanocrystals for the Fabrication of 3D High-Aspect-Ratio Microstructures

Jürgen Brugger, Vahid Fakhfouri

An epoxy-based negative-tone photoresist, which is known as a suitable material for high-aspect-ratio surface micromachining, is functionalized with red-light-emitting CdSe@ZnS nanocrystals (NCs). The proper selection of a common solvent for the NCs and th ...

2007

Inkjet Printing of SU-8; A Case Study for Microlenses

Jürgen Brugger, Edoardo Charbon, Alcherio Martinoli, Vahid Fakhfouri, Grégory Mermoud, Joo Yeon Kim, Dmitri Boiko, Nicolas Jacques Joseph Marie Cantale

This paper describes a novel method to fabricate polymer MEMS based on the inkjet printing of SU-8, with a special emphasis on integrated micro-optical lens arrays. Inkjet control parameters are optimized in order to enable a stable and reproducible ejecti ...

2008

Hybrid polymer microlens arrays with high numerical apertures fabricated using simple ink-jet printing technique

Edoardo Charbon, Jürgen Brugger, Dmitri Boiko, Vahid Fakhfouri, Joo Yeon Kim, Nils Benedict Brauer

Microlens arrays fabricated by a direct ink-jet printing of UV-curable hybrid polymer are reported. A periodic pattern of polymer drops was ink-jet printed on the surface-treated glass substrate and cured in the UV-light. Using this simple technique, we de ...

2011

Inkjet printing of SU-8 for polymer-based MEMS a case study for microlenses

Edoardo Charbon, Jürgen Brugger, Grégory Mermoud, Vahid Fakhfouri, Joo Yeon Kim

This paper describes a novel method to fabricate polymer MEMS based on the inkjet printing of SU-8, with a special emphasis on integrated micro-optical lens arrays. Inkjet control parameters are optimized in order to enable a stable and reproducible ejecti ...

IEEE2008

Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds

Jürgen Brugger, Sébastien Jiguet, Vahid Fakhfouri

We describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer. 250μm-high and 100-10 ...

2006

Towards Smart Substrates for Controlling Micrometric Droplet Motion

Jürgen Brugger, Alcherio Martinoli, Vahid Fakhfouri, Grégory Mermoud

In this contribution, we describe a novel approach to the problem of setting micrometric droplets in motion. First, this paper reviews the state-of-the-art methods to enable millimetric droplet motion, and investigates the scalability of the most promising ...

2007

Inkjet-Printed Multicolor Arrays of Highly Luminescent Nanocrystal-Based Nanocomposites

Jürgen Brugger, Vahid Fakhfouri, Joo Yeon Kim

Inkjet technology is a compelling method for the flexible and cost-effective printing of functional inks. We show that nanocomposite solutions based on polystyrene and differently sized core/shell-type nanocrystals (NCs) formed by a CdSe core coated with a ...

2009

Drop-on-demand inkjet printing of highly luminescent CdS and CdSe@ZnS nanocrystal based nanocomposites

Jürgen Brugger, Vahid Fakhfouri, Joo Yeon Kim

Inkjet printing technology is an emerging deposition method for the flexible and cost-effective dispensing of functional materials. In this work, luminescent single- and multi-colour pixel arrays of chloroform nanocomposite inks based on polystyrene (PS) f ...

2009

Direct Fabrication of Polymer Micro lens Arrays having Tunable Optical Properties using Drop-On-Demand Ink-Jet Printing Technology

Jürgen Brugger, Vahid Fakhfouri, Joo Yeon Kim

Ink-jet printing technique allows locally and precisely dispensing materials for the manufacturing of micro-scale structures. We present the fabrication of piano-convex microlenses using a hybrid organic-inorganic photo-curable polymer diluted in gamma-but ...

Soc Imaging Science & Technology, 7003 Kilworth Lane, Springfield, Va 22151 Usa2009

Drop-on-demand Ink-jet printing of functional materials: Case studies of SU-8 and NCs-embedded Polymer nanocomposites

Jürgen Brugger, Vahid Fakhfouri, Joo Yeon Kim

2008

Drop-On-Demand Inkjet Printing of SU-8 Polymer

Jürgen Brugger, Alcherio Martinoli, Vahid Fakhfouri, Grégory Mermoud, Joo Yeon Kim

This paper presents drop-on-demand inkjet printing of SU-8 on functionalized surfaces for direct printing of computer controlled polymer patterns. The high viscosity of SU-8 required an in-depth investigation of the print parameters such as pulse amplitude ...

2009