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MICRO-724: Advanced topics in micro- and nanomanufacturing: top-down meets bottom-up

Résumé

This course introduces advanced fabrication methods enabling the manufacturing of novel micro- and nanosystems (NEMS/MEMS). Both top-down techniques (lithography, stenciling, scanning probes, additive techniques) and bottom-up approaches (self-assembly) are presented.

Séances de cours

Enseignant·e·s (3)

Jürgen Brugger

I am a Professor of Microengineering and co-affiliated to Materials Science. Before joining EPFL I was at the MESA Research Institute of Nanotechnology at the University of Twente in the Netherlands, at the IBM Zurich Research Laboratory, and at the Hitachi Central Research Laboratory, in Tokyo, Japan. I received a Master in Physical-Electronics and a PhD degree from Neuchâtel University, Switzerland. Research in my laboratory focuses on various aspects of MEMS and Nanotechnology. My group contributes to the field at the fundamental level as well as in technological development, as demonstrated by the start-ups that spun off from the lab. In our research, key competences are in micro/nanofabrication, additive micro-manufacturing, new materials for MEMS, increasingly for wearable and biomedical applications. Together with my students and colleagues we published over 200 peer-refereed papers and I had the pleasure to supervise over 25 PhD students. Former students and postdocs have been successful in receiving awards and starting their own scientific careers. I am honoured for the appointment in 2016 as Fellow of the IEEE “For contributions to micro and nano manufacturing technology”. In 2017 my lab was awarded an ERC AdvG in the field of advanced micro-manufacturing.

Massimo Mastrangeli

Karl Friedrich Böhringer

Source officielle

Page Moodle

http://go.epfl.ch/MICRO-724

Résumé

Séances de cours

Enseignant·e·s (3)

Jürgen Brugger

Massimo Mastrangeli

Karl Friedrich Böhringer

Source officielle

Page Moodle

http://go.epfl.ch/MICRO-724

Proximité ontologique

Génie chimique

Nanotechnologie: Nanotechnologie

Séances de ce cours (4)

Auto-assemblage des microsystèmes

Explore l'auto-assemblage des Microsystèmes, son importance, ses caractéristiques, ses motivations et ses exemples dans divers domaines, en mettant en évidence les réalisations marquantes et les perspectives d'avenir.

Impression de nanoparticules uniques: Top-Down rencontre Bottom-Up

Explore l'impression de nanoparticules simples, le piégeage électrotopographique et les applications basées sur les nanoparticules dans l'assemblage micro/nanosystème.

Nanostencil Lithographie Bases

Couvre les bases de la lithographie nanostencil, y compris les motifs de guidage et les motifs d'échelle grise, pour la fabrication de micro/nano.

Nanomanufacturation avancée : Lithographie et auto-assemblage

Déplacez-vous dans des techniques avancées de nanomanufacturing, y compris la lithographie et le copolymère bloc auto-assemblage pour la fabrication précise des appareils.

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