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Publications associées (23)

A CMOS Compatible Chip-to-Chip 3D Integration Platform

Yusuf Leblebici, Carlotta Guiducci, Michail Zervas, Yüksel Temiz

In this paper, a CMOS-compatible chip-to-chip 3D integration platform will be presented. The developed technology allows reconstituting a wafer from diced and thinned chips. Then, chip-to-chip bonding and TSV fabrication steps are accomplished in wafer-lev ...

IEEE2012

Large micromirror array for generating programmable slit masks for Multi-Object Spectroscopy

Nico de Rooij, Wilfried Noell, Michael David Canonica

Multi-object spectroscopy (MOS) is a powerful tool for space and ground-based telescopes for the study of the formation and evolution of galaxies. This technique requires a programmable slit mask for astronomical object selection. We are engaged in a Europ ...

Spie-Int Soc Optical Engineering2012

Highly inorganic titania based sol–gel as directly patternable resist for micro- and nano- structured surfaces

Jürgen Brugger, Vaida Auzelyte, Agnese Virginia Savegnago

Highly inorganic sol–gel films and patterned surfaces with up to 90% of titania were obtained by hydrolysis and condensation of Titanium(IV) isopropoxide. As a consequence of titania photocatalytic effect, the further treatment of the nanoimprint patterned ...

Elsevier2012