Publication

Thermal Probe Nanopatterning Enables Nanoparticle Assembly on PDMS Substrates

2017
Posters

Abstract

In this work, we demonstrate a nanofabrication technique based on thermal scanning probe lithography (t-SPL), PDMS molding, and bottom-up capillary-assisted particle assembly (CAPA). The repeatability of the pattern transfer from the thermal sensitive polymer poly-phthalaldehyde (PPA) to PDMS is studied. Moreover, after the pattern transfer, the gold nano-rods assembly on PDMS substrates with different trap designs is also demonstrated.

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2017
Posters

Abstract

Official source

Related concepts (12)

Scanning probe lithography

Scanning probe lithography (SPL) describes a set of nanolithographic methods to pattern material on the nanoscale using scanning probes. It is a direct-write, mask-less approach which bypasses the diffraction limit and can reach resolutions below 10 nm. It is considered an alternative lithographic technology often used in academic and research environments. The term scanning probe lithography was coined after the first patterning experiments with scanning probe microscopes (SPM) in the late 1980s.

Nanoparticle

A nanoparticle or ultrafine particle is usually defined as a particle of matter that is between 1 and 100 nanometres (nm) in diameter. The term is sometimes used for larger particles, up to 500 nm, or fibers and tubes that are less than 100 nm in only two directions. At the lowest range, metal particles smaller than 1 nm are usually called atom clusters instead.

Nanolithography

Nanolithography (NL) is a growing field of techniques within nanotechnology dealing with the engineering (patterning e.g. etching, depositing, writing, printing etc) of nanometer-scale structures on various materials. The modern term reflects on a design of structures built in range of 10−9 to 10−6 meters, i.e. nanometer scale. Essentially, the field is a derivative of lithography, only covering very small structures. All NL methods can be categorized into four groups: photo lithography, scanning lithography, soft lithography and other miscellaneous techniques.

Related publications (2)

Thermal Probe Nanopatterning Enables Nanoparticle Assembly on PDMS Substrates

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Ties between microsystem technology and nano-engineering