Publication

Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing

2013
Conference Papers

Abstract

The fabrication of precise hemispherical shape is challenging with standard planar lithography techniques. A suitable alternative is the fabrication by inkjet printing. This paper presents a method based on drop-on-demand inkjet printing on pre-patterned silicon substrates allowing the controlled fabrication of SU-8 hemispherical cup-like structures with inner cavities of sub-nano-liter volumes. Examples are given for cups of 100μm in diameter with inner cavity volumes of 5pL, 20pL and 45pL. Arrays of 360 hemispherical SU-8 cups have been fabricated with a yield above 96%. The 4% of exceptions are also described and shown as a method for achieving almost complete SU-8 spheres.

Official source

https://infoscience.epfl.ch/entities/publication/f5dc58db-7b86-4386-8cfc-8cf65ba604b6

About this result

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Graph Chat

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

2013
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/f5dc58db-7b86-4386-8cfc-8cf65ba604b6

About this result

Related concepts (23)

Inkjet printing

Inkjet printing is a type of computer printing that recreates a by propelling droplets of ink onto paper and plastic substrates. Inkjet printers were the most commonly used type of printer in 2008, and range from small inexpensive consumer models to expensive professional machines. By 2019, laser printers outsold inkjet printers by nearly a 2:1 ratio, 9.6% vs 5.1% of all computer peripherals.As of 2023, sublimation printers have outsold inkjet printers by nearly a 2:1 ratio, accounting for 9.

Digital printing

Digital printing is a method of printing from a digital-based image directly to a variety of media. It usually refers to professional printing where small-run jobs from desktop publishing and other digital sources are printed using large-format and/or high-volume laser or inkjet printers. Digital printing has a higher cost per page than more traditional offset printing methods, but this price is usually offset by avoiding the cost of all the technical steps required to make printing plates.

Semiconductor device fabrication

Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as computer processors, microcontrollers, and memory chips (such as NAND flash and DRAM) that are present in everyday electrical and electronic devices. It is a multiple-step photolithographic and physio-chemical process (with steps such as thermal oxidation, thin-film deposition, ion-implantation, etching) during which electronic circuits are gradually created on a wafer, typically made of pure single-crystal semiconducting material.

Related publications (8)

Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing

Chat with Graph Search

Photopolymer composites for temporary protective coatings and printing applications

Red-Light Tomographic Volumetric 3D Printing in Seconds for Fabrication of Colorless Structures

A carbon fiber elastomer film for mechanically anisotropic enhancement of stretchable electronics