Publication

Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion

Tobias Kippenberg, Junqiu Liu, Johann Emmeram Riemensberger, Rui Ning Wang, Mikhail Churaev, Tianyi Liu
2020
Conference Papers

Abstract

We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid chi((2))-chi((3)) microresonators with Q similar to 10(6), as well as integrated travelling wave EO modulators. (c) 2020 The Author(s)

Official source

https://infoscience.epfl.ch/entities/publication/f35cad37-5721-4b5c-aff2-0493f55e0f80

About this result

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Graph Chat

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion

Chat with Graph Search

Printed degradable piezoelectric microsystems: From ink formulation to device fabrication and characterization

Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches

A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications