Publications related to 100 mm dynamic stencils pattern sub-micrometre structures

Related publications (26)

Towards Scalable Electronics: Synthetic 2D Materials for Large-Area 2D Circuit Integration

In the past decades, a significant increase of the transistor density on a chip has led to exponential growth in computational power driven by Moore's law. To overcome the bottleneck of traditional von-Neumann architecture in computational efficiency, effo ...

EPFL2024

Energy-Efficient Electronic Functions Based on the Co-integration of 2D and Ferroelectric Materials

Sadegh Kamaei Bahmaei

The digital revolution has significantly transformed our world over the past decades, driven by the scaling of transistor dimensions and the exponential increase in computation power. However, as the CMOS scaling era approaches its end, the semiconductor i ...

EPFL2023

Digital manufacturing of personalised footwear with embedded sensors

Danick Briand, Rubaiyet Iftekharul Haque, Jaemin Kim, Ryan Mitchell van Dommelen

The strong clinical demand for more accurate and personalized health monitoring technologies has called for the development of additively manufactured wearable devices. While the materials palette for additive manufacturing continues to expand, the integra ...

Nature Research2023

Wafer-scale MoS2 with water-vapor assisted showerhead MOCVD

Aleksandra Radenovic, Andras Kis, Michal Daniel Macha, Yanfei Zhao, Mukesh Kumar Tripathi, Mukeshchand Thakur, Jing Zhang, Hyungoo Ji

Among numerous thin film synthesis methods, metalorganic chemical vapor deposition performed in a showerhead reactor is the most promising one for broad use in scalable and commercially adaptable two-dimensional material synthesis processes. Adapting the m ...

ROYAL SOC CHEMISTRY2022

A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications

Matthias Neuenschwander

The field of micro electromechanical systems (MEMS) evolved from the microelectronic industry and the technologies developed to fabricate integrated circuits. As a result, MEMS are commonly fabricated on silicon wafers. The development of MEMS has been dri ...

EPFL2022

Atomic layer deposition of Ni and Ni80Fe20 for tubular spin-wave nanocavities

Maria Carmen Giordano

Magnetic thin films and magnetic nanostructures have become essential components of modern technological applications. Modern branches of magnetisms focus on spin-charge coupling (spintronics) and the collective excitation of spin waves in magnetically ord ...

EPFL2021

High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits

Tobias Kippenberg, Junqiu Liu, Rui Ning Wang, Jijun He, Arslan Sajid Raja, Guanhao Huang, Nils Johan Engelsen, Tianyi Liu

Low-loss photonic integrated circuits and microresonators have enabled a wide range of applications, such as narrow-linewidth lasers and chip-scale frequency combs. To translate these into a widespread technology, attaining ultralow optical losses with est ...

Nature Research2021

Wafer-Scale Fabrication of Nanopore Devices for Single-Molecule DNA Biosensing using MoS2

Aleksandra Radenovic, Andras Kis, Martina Lihter, Michal Daniel Macha, Michael Graf, Andrey Chernev, Mukesh Kumar Tripathi, Mukeshchand Thakur, Jochem Deen

Atomically thin (2D) nanoporous membranes are an excellent platform for a broad scope of academic research. Their thickness and intrinsic ion selectivity (demonstrated for example in molybdenum disulfide-MoS2) make them particularly attractive for single-m ...

2020

Optical characterization of high numerical aperture microlenses for quality assessment and fabrication process optimization

Toralf Scharf, Wilfried Noell, Jeremy Béguelin

Accurate characterization of high numerical aperture aspheric microlenses currently is a nonstandard procedure that remains an open challenge. Here, we present and discuss a characterization method based on interferometric and point spread function measure ...

OPTICAL SOC AMER2020

Silicon Nitride Integrated Nonlinear Photonics

Junqiu Liu

Recently, microresonator-based dissipative Kerr soliton frequency combs ( "soliton microcomb " ) have emerged as miniaturized optical frequency combs. So far, soliton microcombs have been realized in many CMOS-compatible material platforms including silico ...

EPFL2020

Material and Electrical study of HfO2-Based Resistive Random Access Memories (ReRAMs)

Behnoush Attarimashalkoubeh

Resistive Random Access Memories (ReRAMs) have been researched intensively in the last past decades as a promising alternatives technology for the next-generation non-volatile memory (NVM) devices. ReRAMâ s excellent performance properties such as high sw ...

EPFL2019

Cryogenic Fab-on-a-Chip Sticks the Landing

Matthias Imboden

Using a microelectromechanical systems (MEMS)-based Fab-on-a-Chip, we quench-condense lead thin-films. Suppressing the formation of lead islands makes it possible to grow a homogeneous and continuous film as thin as 2 nm, without the use of an adhesion lay ...

Amer Chemical Soc2017

Growth Of Organic Semiconductor Thin Films with Multi-Micron Domain Size and Fabrication of Organic Transistors Using a Stencil Nanosieve

Jürgen Brugger, Valentin Flauraud, Shenqi Xie

To grow small molecule semiconductor thin films with domain size larger than modern-day device sizes, we evaporate the material through a dense array of small apertures, called a stencil nanosieve. The aperture size of 0.5 μm results in low nucleation dens ...

Amer Chemical Soc2017

Superplastic behavior of silica nanowires obtained by direct patterning of silsesquioxane-based precursors

Yusuf Leblebici

Silica nanowires spanning 10 μm-deep trenches are fabricated from different types of silsesquioxane-based precursors by direct e-beam patterning on silicon followed by release through deep reactive ion etching. Nanowire aspect ratios as large as 150 are ac ...

Institute of Physics2017

Stereolithography-Based Antennas for Satellite Communications in Ka-Band

Juan Ramon Mosig, Tomislav Debogovic, Maria Garcia Vigueras, Joana Rita Alves dos Santos Silva

This paper illustrates the role of additive manufacturing (AM) as enabling technology to realize high-performance low-cost antennas for Ka-band applications. In addition to the inherent electromagnetic challenges implicit in the conception of such complex ...

Ieee-Inst Electrical Electronics Engineers Inc2017

Plasmonic nanohole arrays on Si-Ge heterostructures: An approach for integrated biosensors

Hatice Altug, Liza Carol Andrea Dunbar, Dordaneh Etezadi

Nanohole array surface plasmon resonance (SPR) sensors offer a promising platform for high-throughput label-free biosensing. Integrating nanohole arrays with group-IV semiconductor photodetectors could enable low-cost and disposable biosensors compatible t ...

Spie-Int Soc Optical Engineering2016

Monolithic perovskite/silicon-heterojunction tandem solar cells processed at low temperature

Michael Graetzel, Mohammad Khaja Nazeeruddin, Ulf Anders Hagfeldt, Michael Saliba, Antonio Abate, Juan-Pablo Correa-Baena, Ludmilla Steier

Tandem solar cells combining silicon and perovskite absorbers have the potential to outperform state-of-the-art high efficiency silicon single junction devices. However, the practical fabrication of monolithic silicon/perovskite tandem solar cells is chall ...

Royal Soc Chemistry2016

Charge-transport properties of monolayer MoS2 at the interface with dielectric materials

Simone Bertolazzi

Two-dimensional (2D) semiconductors, consisting of single-sheets of layered transition metal dichalcogenides (TMD), are attracting enormous interest from both fundamental science and technology. Monolayer molybdenum disulfide (MoS2), a typical example from ...

EPFL2015

Green piezoelectric for autonomous smart textile

Danick Briand, Etienne Pierre Lemaire, Christopher John Borsa

In this work, the fabrication of Rochelle salt based piezoelectric textiles are shown. Structures composed of fibers and Rochelle salt are easily produced using green processes. Both manufacturing and the material itself are really efficient in terms of en ...

Iop Publishing Ltd2015

Design Methodologies and CAD for Emerging Nanotechnologies

Shashi Kanth Bobba

With technology scaling reaching the fundamental limits of Si-CMOS in the near future, the semiconductor industry is in quest for innovation from various disciplines of integrated circuit (IC) design. At a fundamental level, technology forms the main drive ...

EPFL2013