Publication

Ultra-Sensitive Capacitive Detection Based on SGMOSFET Compatible With Front-End CMOS Process

Mihai Adrian Ionescu
2009
Journal Articles

Abstract

Capacitive measurement of very small displacement of nano-electro-mechanical systems (NEMS) presents some issues that are discussed in this article. It is shown that performance is fairly improved when integrating on a same die the NEMS and CMOS electronics. As an initial step toward full integration, an in-plane suspended gate MOSFET (SGMOSFET) compatible with a front-end CMOS has been developed. The device model, its fabrication, and its experimental measurement are presented. Performance obtained with this device is experimentally compared to the one obtained with a stand-alone NEMS readout circuit, which is used as a reference detection system. The 130 nm CMOS ASIC uses a bridge measurement technique and a high sensitive first stage to minimize the influence of any parasitic capacitances.

Official source

https://infoscience.epfl.ch/entities/publication/f26c09e1-e774-4d44-b44e-76307ec10b74

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Mihai Adrian Ionescu
2009
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/f26c09e1-e774-4d44-b44e-76307ec10b74

About this result

Related concepts (32)

CMOS

Complementary metal–oxide–semiconductor (CMOS, pronounced "sea-moss", siːmɑːs, -ɒs) is a type of metal–oxide–semiconductor field-effect transistor (MOSFET) fabrication process that uses complementary and symmetrical pairs of p-type and n-type MOSFETs for logic functions. CMOS technology is used for constructing integrated circuit (IC) chips, including microprocessors, microcontrollers, memory chips (including CMOS BIOS), and other digital logic circuits.

Microprocessor chronology

The first microprocessors were designed and manufactured in the 1970s. Intel's 4004 of 1971 is widely regarded as the first commercial microprocessor. Designers predominantly used MOSFET transistors with pMOS logic in the early 1970s, switching to nMOS logic after the mid-1970s. nMOS had the advantage that it could run on a single voltage, typically +5V, which simplified the power supply requirements and allowed it to be easily interfaced with the wide variety of +5V transistor-transistor logic (TTL) devices.

Capacitive sensing

In electrical engineering, capacitive sensing (sometimes capacitance sensing) is a technology, based on capacitive coupling, that can detect and measure anything that is conductive or has a dielectric constant different from air. Many types of sensors use capacitive sensing, including sensors to detect and measure proximity, pressure, position and displacement, force, humidity, fluid level, and acceleration. Human interface devices based on capacitive sensing, such as touchpads, can replace the computer mouse.

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Ultra-Sensitive Capacitive Detection Based on SGMOSFET Compatible With Front-End CMOS Process

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