Publication

ELECTROSTATIC CLAMPING CHUCK FOR NANOSTENCILS

2006
Reports

Abstract

There is growing interest in using alternative, resistless patterning techniques. Stencil lithography or shadow masking is one of the possible solutions. By means of physical vapor deposition many different materials can be evaporated in vacuum and patterned through a mask onto a substrate. This can be done in static and dynamic mode. The LMIS1 group is currently developing stencils with improved characteristics as well as a setup that will allow dynamic stencil deposition. In such a setup, a nanostencil is mounted onto a xy-stage and is then moved relative to the substrate. The goal of this project is to develop a miniaturized electrostatic chuck that allows the clamping of nanostencils in a reliable and user-friendly manner.

Official source

https://infoscience.epfl.ch/entities/publication/f0e19617-02e1-4246-b159-e8809189e004

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2006
Reports

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/f0e19617-02e1-4246-b159-e8809189e004

About this result

Related concepts (32)

Physical vapor deposition

Physical vapor deposition (PVD), sometimes called physical vapor transport (PVT), describes a variety of vacuum deposition methods which can be used to produce thin films and coatings on substrates including metals, ceramics, glass, and polymers. PVD is characterized by a process in which the material transitions from a condensed phase to a vapor phase and then back to a thin film condensed phase. The most common PVD processes are sputtering and evaporation.

Chemical vapor deposition

Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films. In typical CVD, the wafer (substrate) is exposed to one or more volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit. Frequently, volatile by-products are also produced, which are removed by gas flow through the reaction chamber.

Project

A project is any undertaking, carried out individually or collaboratively and possibly involving research or design, that is carefully planned to achieve a particular goal. An alternative view sees a project managerially as a sequence of events: a "set of interrelated tasks to be executed over a fixed period and within certain cost and other limitations". A project may be a temporary (rather than a permanent) social system (work system), possibly staffed by teams (within or across organizations) to accomplish particular tasks under time constraints.

Related publications (32)

ELECTROSTATIC CLAMPING CHUCK FOR NANOSTENCILS

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