Publication

Evaluation of Temporary Bonding Techniques for Pfas-Free Polymer Integration in Mems Devices

2026

Abstract

Recent advances in piezoelectric MEMS have shifted from pure-silicon platforms to hybrid polymer-Si architectures to overcome performance limitations and expand functionality. Implementing rigid-flexible (polymer-Si) designs on thin substrates with emerging PFAS-free polymers necessitates reliable temporary bonding methods. This work evaluates four industrially compatible bonding/debonding techniques using liquid adhesive and dry tape for fabricating suspended $\text{Si}-{}$ polymer structures on 8 -inch wafers with SU-8 dry film (DF). The fabricated structures enable direct mechanical characterization via compression testing and continuous stiffness measurement (CSM). These insights into bonding strategies and polymer properties pave the way for integration of emerging PFAS-free polymers into MEMS technologies.

Official source

https://infoscience.epfl.ch/entities/publication/f0523733-1c9d-48f0-ad4f-6ec01dc2f3d5

About this result

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Graph Chat

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

2026

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/f0523733-1c9d-48f0-ad4f-6ec01dc2f3d5

About this result

Related concepts (32)

Polymer

A polymer (ˈpɒlᵻmər; Greek poly-, "many" + -mer, "part") is a substance or material consisting of very large molecules called macromolecules, composed of many repeating subunits. Due to their broad spectrum of properties, both synthetic and natural polymers play essential and ubiquitous roles in everyday life. Polymers range from familiar synthetic plastics such as polystyrene to natural biopolymers such as DNA and proteins that are fundamental to biological structure and function.

Polymer chemistry

Polymer chemistry is a sub-discipline of chemistry that focuses on the structures of chemicals, chemical synthesis, and chemical and physical properties of polymers and macromolecules. The principles and methods used within polymer chemistry are also applicable through a wide range of other chemistry sub-disciplines like organic chemistry, analytical chemistry, and physical chemistry. Many materials have polymeric structures, from fully inorganic metals and ceramics to DNA and other biological molecules.

Polymerization

In polymer chemistry, polymerization (American English), or polymerisation (British English), is a process of reacting monomer molecules together in a chemical reaction to form polymer chains or three-dimensional networks. There are many forms of polymerization and different systems exist to categorize them. In chemical compounds, polymerization can occur via a variety of reaction mechanisms that vary in complexity due to the functional groups present in the reactants and their inherent steric effects.

Related publications (21)

Evaluation of Temporary Bonding Techniques for Pfas-Free Polymer Integration in Mems Devices

Chat with Graph Search

Photopolymer composites for temporary protective coatings and printing applications

Tailoring glass properties and microstructure with sub-100 femtosecond pulses

Chemoselective Sequential Polymerization: An Approach Toward Mixed Plastic Waste Recycling