Publication

Micromechanical testing of SU-8 cantilevers

Tobias Kramer
2003
Conference Papers

Abstract

SU-8 is a photoplastic polymer with a wide range of applications in microtechnology. Cantilevers designed for a commercial Atomic Force Microscope (AFM) were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale mechanical testing techniques: contact surface profilometer deflection, known as MAT-Test, and static load deflection using a specially designed test machine, the MFT2000. The Young’s modulus values from the microscale test methods are approximately 2-3 GPa. These results are compared with results from macroscale tests of 4-5 GPa. The test methods and the results are discussed.

Official source

https://infoscience.epfl.ch/entities/publication/e51596ab-4b4c-4217-8682-11e8264cb7b1

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Tobias Kramer
2003
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/e51596ab-4b4c-4217-8682-11e8264cb7b1

About this result

Related concepts (21)

Atomic force microscopy

Atomic force microscopy (AFM) or scanning force microscopy (SFM) is a very-high-resolution type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than the optical diffraction limit. Atomic force microscopy (AFM) is a type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than the optical diffraction limit.

Scanning probe microscopy

Scanning probe microscopy (SPM) is a branch of microscopy that forms images of surfaces using a physical probe that scans the specimen. SPM was founded in 1981, with the invention of the scanning tunneling microscope, an instrument for imaging surfaces at the atomic level. The first successful scanning tunneling microscope experiment was done by Gerd Binnig and Heinrich Rohrer. The key to their success was using a feedback loop to regulate gap distance between the sample and the probe.

Transmission electron microscopy

Transmission electron microscopy (TEM) is a microscopy technique in which a beam of electrons is transmitted through a specimen to form an image. The specimen is most often an ultrathin section less than 100 nm thick or a suspension on a grid. An image is formed from the interaction of the electrons with the sample as the beam is transmitted through the specimen. The image is then magnified and focused onto an imaging device, such as a fluorescent screen, a layer of photographic film, or a sensor such as a scintillator attached to a charge-coupled device.

Related publications (8)

Micromechanical testing of SU-8 cantilevers

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