Publication

3D stacked arrays of fins and nanowires on bulk silicon

Mihai Adrian Ionescu, Cyrille Hibert
2010
Journal Articles

Abstract

The development of a particular etching recipe involving two sequences of a Deep Reactive Ion Etching followed by an isotropic etching step for the realization of 3D stacked arrays of fins and nanowires on bulk silicon is reported. Such a recipe can be used among the new processes and designs developed to control the shape and formation of such 3D structures. Applications in microelectronics (stacked field effect transistors) and microsystems (arrays of MEMS resonators and photonic structures) are foreseen. (C) 2010 Elsevier B.V. All rights reserved.

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https://infoscience.epfl.ch/entities/publication/e3de85fa-c4dc-4847-a39d-2f3539d6a2ec

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Mihai Adrian Ionescu, Cyrille Hibert
2010
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/e3de85fa-c4dc-4847-a39d-2f3539d6a2ec

About this result

Related concepts (32)

MEMS

MEMS (Microelectromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.

Semiconductor device fabrication

Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as computer processors, microcontrollers, and memory chips (such as NAND flash and DRAM) that are present in everyday electrical and electronic devices. It is a multiple-step photolithographic and physio-chemical process (with steps such as thermal oxidation, thin-film deposition, ion-implantation, etching) during which electronic circuits are gradually created on a wafer, typically made of pure single-crystal semiconducting material.

Array (data structure)

In computer science, an array is a data structure consisting of a collection of elements (values or variables), of same memory size, each identified by at least one array index or key. An array is stored such that the position of each element can be computed from its index tuple by a mathematical formula. The simplest type of data structure is a linear array, also called one-dimensional array. For example, an array of ten 32-bit (4-byte) integer variables, with indices 0 through 9, may be stored as ten words at memory addresses 2000, 2004, 2008, .

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3D stacked arrays of fins and nanowires on bulk silicon

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