Publication

High aspect ratio planar coils embedded in SU8 photoepoxy for MEMS applications

Philippe Renaud
1998
Conference Papers

Abstract

Planar micromachined spiral inductive structures have applications in many areas such as microelectronics components (filters, low-power components, etc), or such as sensors (proximity sensors) and actuators (electromagnetic micromotors, micropumps, microrelays:, etc). The fabrication of such devices is however rather complicated. In this work we present a new way to realize planar microcoils by using the high-aspect ratio SU8 photoepoxy. Small microinductors with inductances of 0.1 mu H (no magnetic core used) have been achieved. They can be used as self-alone devices or be directly realized on integrated circuits with low-temperature (< 100 degrees C) postprocessing fabrication steps.

Official source

https://infoscience.epfl.ch/entities/publication/e2c4d29f-a51d-4db9-9723-01957edbab9d

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Philippe Renaud
1998
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/e2c4d29f-a51d-4db9-9723-01957edbab9d

About this result

Related concepts (26)

Integrated circuit

An integrated circuit or monolithic integrated circuit (also referred to as an IC, a chip, or a microchip) is a set of electronic circuits on one small flat piece (or "chip") of semiconductor material, usually silicon. Large numbers of miniaturized transistors and other electronic components are integrated together on the chip. This results in circuits that are orders of magnitude smaller, faster, and less expensive than those constructed of discrete components, allowing a large transistor count.

Microelectronics

Microelectronics is a subfield of electronics. As the name suggests, microelectronics relates to the study and manufacture (or microfabrication) of very small electronic designs and components. Usually, but not always, this means micrometre-scale or smaller. These devices are typically made from semiconductor materials. Many components of a normal electronic design are available in a microelectronic equivalent. These include transistors, capacitors, inductors, resistors, diodes and (naturally) insulators and conductors can all be found in microelectronic devices.

Mixed-signal integrated circuit

A mixed-signal integrated circuit is any integrated circuit that has both analog circuits and digital circuits on a single semiconductor die. Their usage has grown dramatically with the increased use of cell phones, telecommunications, portable electronics, and automobiles with electronics and digital sensors. Integrated circuits (ICs) are generally classified as digital (e.g. a microprocessor) or analog (e.g. an operational amplifier). Mixed-signal ICs contain both digital and analog circuitry on the same chip, and sometimes embedded software.

Related publications (2)

High aspect ratio planar coils embedded in SU8 photoepoxy for MEMS applications

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