Piezoelectric Nanoelectromechanical Systems

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The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene's fundamental material characteristics and thus enable i ...

Etching an ensemble of vacancy defects (nanopores) in single-layer graphene (SLG) to obtain a high density of nanopores with an effective size that enables high-performance gas sieving is challenging. This is because nanopore nucleation and expansion are u ...

Graphene's unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the inte ...

Here, we discuss a novel, mixed mode 3D XYZ scanner built within a single foundry process. The device has a large range of motion in X, Y, and Z (14.1 mu m in X and Y and 97.9 mu m in Z) and can also rotate about two axes (7.4 degrees), making it a 5 degre ...

During the past decade, graphene --- a monolayer of carbon atoms --- has attracted enormous interest for its use in nanoelectronic device applications. The absence of bandgap, however, has stalled its use both in logic (inability to turn off) and radio fre ...

Nanoelectromechanical (NEM) switches have the potential to complement or replace traditional CMOS transistors in the area of ultra-low-power digital electronics. This paper reports the demonstration of prototype circuits including the first 3-stage ring os ...

A new and versatile fabrication process of insulated gold tip probes for atomic force microscopy (AFM) is presented by Wu et al. (In-plane fabricated insulated gold-tip probe for electrochemical and molecular experiments, in: 2013 IEEE 26th International C ...

Nanoelectromechanical (NEM) switches have the potential to complement or replace traditional CMOS transistors in the area of ultra-low power digital electronics. This paper reports the demonstration of the first ring oscillator built using cell-level digit ...

The RF performance of a nanoelectromechanical systems (NEMS) capacitive switch based on graphene is evaluated. Our results show that graphene can be a good candidate for the membrane of RF NEMS switches in applications where low actuation voltage and fast ...

In this contribution we present a scanning probe with a gold-tip completely encapsulated with insulator all the way to the apex. The probe fabrication is unique owing to an in-plane arrangement in which the width of the cantilever is defined by deep reacti ...

In this work, nanosphere lithography was integrated with standard microfabrication for the wafer-scale fabrication of silicon nitride (SiN) membranes with arrays of submicrometer holes. A monolayer of polystyrene (PS) beads with a mean diameter of 428 or 5 ...

Si nanowire (NW) stacks are fabricated by utilizing the scalloping effect of inductively coupled plasma deep reactive ion etching. When two etch windows are brought close enough, scallops from both sides will ideally meet along the dividing centerline of t ...

We present nanostencil lithography as a new and parallel nanopatterning technique for batch fabrication of micro/ nanoelectromechanical systems (MEMS/NEMS) with high throughput and resolution. We use nanostencil lithography for the purpose of integrating n ...

Piezoelectric Nanoelectromechanical Systems

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Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors

Systematic design of millisecond gasification reactor for the incorporation of gas-sieving nanopores in single-layer graphene

Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications

A Large Range of Motion 3D MEMS Scanner With Five Degrees of Freedom

Graphene for Nanoelectronic Applications

Nanoelectromechanical digital logic circuits using curved cantilever switches with amorphous-carbon-coated contacts

In-plane fabrication of insulated gold-tip probes for electrochemical and force spectroscopy molecular experiments

A 6.7 MHz Nanoelectromechanical Ring Oscillator Using Curved Cantilever Switches Coated with Amorphous Carbon

Electromagnetic Performance of RF NEMS Graphene Capacitive Switches

In-Plane Fabricated Insulated Gold-Tip Probe For Electrochemical And Molecular Experiments

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

Monolithic Integration of Silicon Nanowires With a Microgripper

Dry etching for the correction of gap-induced blurring and improved pattern resolution in nanostencil lithography