Publication

SMD pressure and flow sensor for compressed air in LTCC technology with integrated electronics

Thomas Maeder, Peter Ryser
2009
Conference Papers

Abstract

We have designed and fabricated a low-range (ca. 100 mN) thick-film piezoresistive force sensor with a cantilever beam fabricated in LTCC (Low Temperature Co-fired Ceramic). The beam was soldered onto a standard thick-film 25.4 x 12.7 mm signal conditioning base [1]. Switching from a classical Al2O3-based thick-film beam to LTCC allows design of a 3D structured beam with increased sensitivity of the piezoresistive bridge, yet largely conserved strength and stiffness. Another advantage of LTCC compared to alumina is a lower Young’s modulus (approx. 3 times lower), more suitable for the measurement of small loads.

Official source

https://infoscience.epfl.ch/entities/publication/de119426-1953-4c19-b4cb-d83cdde44aa0

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Thomas Maeder, Peter Ryser
2009
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/de119426-1953-4c19-b4cb-d83cdde44aa0

About this result

Related concepts (32)

Co-fired ceramic

Co-fired ceramic devices are monolithic, ceramic microelectronic devices where the entire ceramic support structure and any conductive, resistive, and dielectric materials are fired in a kiln at the same time. Typical devices include capacitors, inductors, resistors, transformers, and hybrid circuits. The technology is also used for robust assembly and packaging of electronic components multi-layer packaging in the electronics industry, such as military electronics, MEMS, microprocessor and RF applications.

Electronics

Electronics is a scientific and engineering discipline that studies and applies the principles of physics to design, create, and operate devices that manipulate electrons and other charged particles. Electronics is a subfield of electrical engineering, but it differs from it in that it focuses on using active devices such as transistors, diodes, and integrated circuits to control and amplify the flow of electric current and to convert it from one form to another, such as from alternating current (AC) to direct current (DC) or from analog to digital.

Integrated circuit

An integrated circuit or monolithic integrated circuit (also referred to as an IC, a chip, or a microchip) is a set of electronic circuits on one small flat piece (or "chip") of semiconductor material, usually silicon. Large numbers of miniaturized transistors and other electronic components are integrated together on the chip. This results in circuits that are orders of magnitude smaller, faster, and less expensive than those constructed of discrete components, allowing a large transistor count.

Related publications (3)

SMD pressure and flow sensor for compressed air in LTCC technology with integrated electronics

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