Publication

Conducting barrier electrodes for direct contact of PZT thin films on tungsten

Nava Setter, Paul Muralt
1998
Journal Articles

Abstract

Two W protection schemes for direct-contact bottom electrodes for PZT thin films, namely RuO2/Cr and RuO2/Ru, were compared with respect to protective performance and contact resistance up to 800 degrees C annealing temperature in oxygen. Cr clearly offers better protection for W than Ru-based schemes by forming a passivating Cr2O3 layer. No Cr is detected on the RuO2 surface, even after annealing at 800 degrees C, due to its entrapment by RuO2 by oxidoreduction. However, the formation of a continuous Cr2O3 film at the RuO2/Cr interface gives rise to an increased contact resistance above 650 degrees C. RuO2/Ru does not show any measurable contact resistance on W, but fails above 600 degrees C.

Official source

https://infoscience.epfl.ch/entities/publication/cfa9d3b3-5432-40fa-aad3-44e6414436fc

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Nava Setter, Paul Muralt
1998
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/cfa9d3b3-5432-40fa-aad3-44e6414436fc

About this result

Related concepts (31)

Supercapacitor

A supercapacitor (SC), also called an ultracapacitor, is a high-capacity capacitor, with a capacitance value much higher than other capacitors but with lower voltage limits. It bridges the gap between electrolytic capacitors and rechargeable batteries. It typically stores 10 to 100 times more energy per unit volume or mass than electrolytic capacitors, can accept and deliver charge much faster than batteries, and tolerates many more charge and discharge cycles than rechargeable batteries.

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The term contact resistance refers to the contribution to the total resistance of a system which can be attributed to the contacting interfaces of electrical leads and connections as opposed to the intrinsic resistance. This effect is described by the term electrical contact resistance (ECR) and arises as the result of the limited areas of true contact at an interface and the presence of resistive surface films or oxide layers. ECR may vary with time, most often decreasing, in a process known as resistance creep.

Thin film

A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many applications. A familiar example is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors, while more recently the metal layer is deposited using techniques such as sputtering.

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Conducting barrier electrodes for direct contact of PZT thin films on tungsten

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