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We present a photoemission study of the initial growth stages of amorphous Si on the InP(110) cleaved surface, performed at 120 K and compared with the room-temperature (RT) results. Deposition at low temperature gives a larger valence-band discontinuity with respect to RT and high-temperature (280-degrees-C) growth. This effect is explained by the smaller outdiffusion of In atoms in the silicon overlayer.