A glass-based, high density microelectrode array (MEA) with integrated CMOS amplification

A new bio-interface for active MEAs is presented in this paper. Unlike standard approaches that deposit MEA electrodes using post-processing of the integrated circuit, the proposed structure is based on Ti/Pt microelectrodes inserted by microfabrication into a glass interface, which is then connected to CMOS amplifiers by high density indium bumps. The concept permits construction of high density microelectrode arrays displaying high biocompatibility and, furthermore, offers the possibility to co-implement other types of detectors on the same substrate thereby allowing multiparameter, long-term measurements of biological process.