Publication

Dielectric Transduction of NEMS

2017
Posters

Abstract

We report on a four-mask process flow for creating resonant NanoElectroMechanical Systems (NEMS) based on dielectric transduction. Current transduction mechanisms for NEMS include piezoelectricity, flexoelectricity and dielectric force. While piezoelectricity gives the highest electromechanical efficiency in, NEMS using flexoelectricity and dielectric force are interesting alternatives with a larger range of possible active materials and potentially simpler fabrication. In this four-mask process flow, doubly-clamped beams and cantilevers are patterned and released from the substrate. The beams are built of molybdenum (Mo) and halfnium oxide (HfO2).

Official source

https://infoscience.epfl.ch/entities/publication/c3821b59-3a8b-4a94-8bb5-27b89149eff9

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2017
Posters

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/c3821b59-3a8b-4a94-8bb5-27b89149eff9

About this result

Related concepts (25)

Piezoelectricity

Piezoelectricity (ˌpiːzoʊ-,_ˌpiːtsoʊ-,_paɪˌiːzoʊ-, piˌeɪzoʊ-,_piˌeɪtsoʊ-) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word piezoelectricity means electricity resulting from pressure and latent heat. It is derived (an ancient source of electric current). The piezoelectric effect results from the linear electromechanical interaction between the mechanical and electrical states in crystalline materials with no inversion symmetry.

MEMS

MEMS (Microelectromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.

Electromechanics

In engineering, electromechanics combines processes and procedures drawn from electrical engineering and mechanical engineering. Electromechanics focuses on the interaction of electrical and mechanical systems as a whole and how the two systems interact with each other. This process is especially prominent in systems such as those of DC or AC rotating electrical machines which can be designed and operated to generate power from a mechanical process (generator) or used to power a mechanical effect (motor).

Related publications (3)

Dielectric Transduction of NEMS

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Domain wall contributions in Pb(Zr,Ti)O3 ceramics at morphotropic phase boundary: A study of dielectric dispersion

Dielectric and electromechanical properties of ferroelectric-relaxor 0.9 Pb(Mg1/3Nb2/3)O-3-0.1PbTiO(3) thin films

Electromechanical properties of sol-gel derived Ca-modified PbTiO3 films