Publication

Microchannel fabrication

2017
Student Projects

Abstract

In this project, we have studied a new microchannel fabrication technique based on the idea of the transference of a thin layer of Si3N4 on top of grooves to form channels. In order to do so, we have created two different wafers. The first of them was a silicon wafer with grooves. We have covered this wafer with Si3N4 and cut it into chips. The other one was a Si wafer covered with Si3N4 on one of its sides. The wafer is cut into chips and thinned down to a thickness of about 50 um. Both processes have been carried out at a clean room. The next steps have taken place in a laboratory. In this environment, we have etched the Si from the Si3N4 chips until we had a thin layer of Si3N4 and transfer this layer on the top of the chips with grooves. After analyzing the complete microchannel chips with the microscope, we have concluded that this process can be a good alternative to existing fabrication techniques.

Official source

https://infoscience.epfl.ch/entities/publication/b2c0e3dc-39b5-486c-935a-37f31abfe515

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2017
Student Projects

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/b2c0e3dc-39b5-486c-935a-37f31abfe515

About this result

Related concepts (30)

Wafer (electronics)

In electronics, a wafer (also called a slice or substrate) is a thin slice of semiconductor, such as a crystalline silicon (c-Si), used for the fabrication of integrated circuits and, in photovoltaics, to manufacture solar cells. The wafer serves as the substrate for microelectronic devices built in and upon the wafer. It undergoes many microfabrication processes, such as doping, ion implantation, etching, thin-film deposition of various materials, and photolithographic patterning.

Sodium channel

Sodium channels are integral membrane proteins that form ion channels, conducting sodium ions (Na+) through a cell's membrane. They belong to the superfamily of cation channels. They are classified into 2 types: In excitable cells such as neurons, myocytes, and certain types of glia, sodium channels are responsible for the rising phase of action potentials. These channels go through three different states called resting, active and inactive states.

Potassium channel

Potassium channels are the most widely distributed type of ion channel found in virtually all organisms. They form potassium-selective pores that span cell membranes. Potassium channels are found in most cell types and control a wide variety of cell functions. Potassium channels function to conduct potassium ions down their electrochemical gradient, doing so both rapidly (up to the diffusion rate of K+ ions in bulk water) and selectively (excluding, most notably, sodium despite the sub-angstrom difference in ionic radius).

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Microchannel fabrication

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