Publication

Optical Ring Resonators in Sputtered Aluminum Nitride on Insulator for Integrated Photonic MEMS

Luis Guillermo Villanueva Torrijo, Hernán Furci
2024

Abstract

This study explores the utilization of sputtered aluminum nitride (AlN) thin film on insulator as a platform for integrated photonic MEMS. We experimentally demonstrate proof-of-concept photonic ring resonators with Q-factors up to 31000 at a resonance wavelength of 1.5795 μm.

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Optical Ring Resonators in Sputtered Aluminum Nitride on Insulator for Integrated Photonic MEMS

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