Publication

Pulsed laser deposition of KNN-based ferroelectric thin films on platinised Si substrates

Paul Muralt
2010
Conference Papers

Abstract

In this paper we report work on a modified potassium sodium niobate composition that has the potential to replace PZT for piezoelectric thin film applications. Pulsed laser depositions were undertaken on platinised Si substrates. The resultant films were found to be well-oriented in the [100] direction and almost phase-pure. TEM analysis of film cross-sections revealed the grain structure to be highly columnar. Values for P-s = 3.8 mu C/cm(2) and E-c = 20 kV/cm were derived from polarisation hysteresis measurements for a 32 mu m thick film. Finally, piezoresponse force microscopy was used to map the local piezoelectric activity down to the level of individual grains in the film.

Official source

https://infoscience.epfl.ch/entities/publication/a576f5bb-4bd8-415d-b3a4-8bf2344c5a5e

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Paul Muralt
2010
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/a576f5bb-4bd8-415d-b3a4-8bf2344c5a5e

About this result

Related concepts (32)

Piezoelectricity

Piezoelectricity (ˌpiːzoʊ-,_ˌpiːtsoʊ-,_paɪˌiːzoʊ-, piˌeɪzoʊ-,_piˌeɪtsoʊ-) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word piezoelectricity means electricity resulting from pressure and latent heat. It is derived (an ancient source of electric current). The piezoelectric effect results from the linear electromechanical interaction between the mechanical and electrical states in crystalline materials with no inversion symmetry.

Ferroelectricity

Ferroelectricity is a characteristic of certain materials that have a spontaneous electric polarization that can be reversed by the application of an external electric field. All ferroelectrics are also piezoelectric and pyroelectric, with the additional property that their natural electrical polarization is reversible. The term is used in analogy to ferromagnetism, in which a material exhibits a permanent magnetic moment. Ferromagnetism was already known when ferroelectricity was discovered in 1920 in Rochelle salt by Joseph Valasek.

Pulsed laser deposition

Pulsed laser deposition (PLD) is a physical vapor deposition (PVD) technique where a high-power pulsed laser beam is focused inside a vacuum chamber to strike a target of the material that is to be deposited. This material is vaporized from the target (in a plasma plume) which deposits it as a thin film on a substrate (such as a silicon wafer facing the target). This process can occur in ultra high vacuum or in the presence of a background gas, such as oxygen which is commonly used when depositing oxides to fully oxygenate the deposited films.

Related publications (7)

Pulsed laser deposition of KNN-based ferroelectric thin films on platinised Si substrates

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