Publication

Friction based locomotion module for mobile MEMS robots

Related publications (29)

Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films

Paul Muralt, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko

In this work, bar- and disk-shaped resonators were fabricated using Al(0.8)4Sc(0.16)N thin film Sensitivity analysis of the resonators' resonance frequencies with respect to the piezoelectric material parameters revealed that resonance analysis can be used ...

IEEE2018

Dynamic pressure probe response tests for robust measurements in periodic flows close to probe resonating frequency

Jürg Alexander Schiffmann, Fatma Ceyhun Sahin

A single-hole probe was designed to measure steady and periodic flows with high fluctuation amplitudes and with minimal flow intrusion. Because of its high aspect ratio, estimations showed that the probe resonates at a frequency two orders of magnitude low ...

Institute of Physics2018

3D printed microwave cavity for atomic clock applications: proof of concept

Anja Skrivervik, Emile Jacques de Rijk

The authors present the realisation and characterisation of an additively manufactured (AM) microwave resonator cavity for double-resonance (DR) vapour-cell atomic clocks. The design of the compact microwave cavity is based on the loop-gap resonator approa ...

2018

An Eight lanes 7Gb/s/pin Source Synchronous Single-Ended RX with Equalization and Far-End Crosstalk Cancellation for Backplane Channels

Yusuf Leblebici, Alessandro Cevrero, Lukas Kull, Volkan Cevher, Thomas Toifl, Cosimo Aprile

This paper presents a versatile crosstalk cancellation scheme for single-ended multi-lane backplane links. System-level investigations show that a scheme, which combines analog filters and decision-feedback crosstalk compensation on the receiver (RX) side ...

2018

Characterization of a Piezoelectric AlN Beam Array in Air and Fluid for an Artificial Basilar Membrane

Jongmoon Jang

In this study, we present a piezoelectric artificial basilar membrane (ABM) composed of a 10-channel aluminum nitride beam array. Each beam varies in length from 1306 to 3194 mu m for mimicking the frequency selectivity of the cochlea. To characterize the ...

KOREAN INST METALS MATERIALS2018

Monolithic technology for silicon nanowires in high-topography architectures

Yusuf Leblebici, Mustafa Yilmaz, Mohammad Nasr Esfahani

Integration of silicon nanowires (Si NWs) in three-dimensional (3D) devices including integrated circuits (ICs) and microelectromechanical systems (MEMS) leads to enhanced functionality and performance in diverse applications. The immediate challenge to th ...

Elsevier2017

Tuning the resonance frequencies and mode shapes in a large range multi-degree of freedom micromirror

Matthias Imboden

The ability to actively shift the primary resonance of a 2D scanning micromirror allows the user to set the scanning direction, set the scanning frequency, and lift otherwise degenerate modes in a symmetrically designed system. In most cases, resonant scan ...

Optical Soc Amer2017

Three-Dimensional Nano-Acoustic Bragg Reflectors for CMOS Embedded NEMS

David Ruffieux, Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli

Integration of CMOS electronic circuits and electromechanical resonators has been pursued for a long time by many different research groups and even foundries. This would improve the overall performance of electromechanical oscillators and sensors. However ...

Institute of Electrical and Electronics Engineers2017

A Deep Etching Mechanism for Trench-Bridging Silicon Nanowires

Yusuf Leblebici, Zuhal Tasdemir

Introducing a single silicon nanowire with a known orientation and dimensions to a specific layout location constitutes a major challenge. The challenge becomes even more formidable, if one chooses to realize the task in a monolithic fashion with an extrem ...

Institute of Physics2016