Publication

Resonantly Enhanced Near-Field Lithography

Demetri Psaltis
2008
Conference Papers

Abstract

We propose the combination of a planar optical resonator and a solid immersion lens for resonantly enhanced non-contact near-field lithography. Subwavelength small spots can be produced by exciting the Bessel modes of the resonator. (C) 2008 Optical Society of America

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Resonantly Enhanced Near-Field Lithography

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