Publication

SMD pressure and flow sensor for compressed air in LTCC technology with integrated electronics

Thomas Maeder, Peter Ryser
2010
Conference Papers

Abstract

In this work, we present an integrated flow / pressure / temperature multisensor in LTCC (low- temperature co-fired ceramic) technology designed for diagnostics monitoring of standard industrial compressed air circuits and devices, such as valves and actuators. The pressure sensor is based on a membrane carrying a thick-film piezoresistive Wheatstone bridge. Flow is sensed using the constant- temperature anemometric principle, with the sensing thermistors placed in a fluidics channel, which also comprises similar thermistors for temperature sensing. All three sensors are integrated into a single surface-solderable LTCC unit, with the solder fulfilling the roles of mechanical fastening, electrical connectivity and fluidic sealing. In this work, the flow-sensing part is demonstrated, and possible improvements in efficiency outlined. Key words: multisensors, flow, pressure, temperature, LTCC

Official source

https://infoscience.epfl.ch/entities/publication/98be49de-36c9-481f-b7f9-9a0a015986b1

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Thomas Maeder, Peter Ryser
2010
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/98be49de-36c9-481f-b7f9-9a0a015986b1

About this result

Related concepts (32)

Integrated circuit

An integrated circuit or monolithic integrated circuit (also referred to as an IC, a chip, or a microchip) is a set of electronic circuits on one small flat piece (or "chip") of semiconductor material, usually silicon. Large numbers of miniaturized transistors and other electronic components are integrated together on the chip. This results in circuits that are orders of magnitude smaller, faster, and less expensive than those constructed of discrete components, allowing a large transistor count.

Co-fired ceramic

Co-fired ceramic devices are monolithic, ceramic microelectronic devices where the entire ceramic support structure and any conductive, resistive, and dielectric materials are fired in a kiln at the same time. Typical devices include capacitors, inductors, resistors, transformers, and hybrid circuits. The technology is also used for robust assembly and packaging of electronic components multi-layer packaging in the electronics industry, such as military electronics, MEMS, microprocessor and RF applications.

Electronics

Electronics is a scientific and engineering discipline that studies and applies the principles of physics to design, create, and operate devices that manipulate electrons and other charged particles. Electronics is a subfield of electrical engineering, but it differs from it in that it focuses on using active devices such as transistors, diodes, and integrated circuits to control and amplify the flow of electric current and to convert it from one form to another, such as from alternating current (AC) to direct current (DC) or from analog to digital.

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SMD pressure and flow sensor for compressed air in LTCC technology with integrated electronics

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