Publication

The suspended-gate MOSFET (SG-MOSFET): A modeling outlook for the design of RF MEMS switches and tunable capacitors

Mihai Adrian Ionescu, Philippe Renaud, Cyrille Hibert, Philippe Flückiger, Georges-André Racine
2001
Conference Papers

Abstract

This paper reports on the modeling and key design aspects of an innovative MEMS device: the suspended-gate MOSFET (SG-MOSFET). Based on the coupled-electromechanical equations describing the suspended gate actuation, we present the investigation of the pull-in voltages and of the capacitance switching and tuning ranges for RF applications. A quasi-analytical model and is developed for the gate-to-substrate capacitance of the SG-MOSFET and then, validated by numerical simulation. A SPICE macro-model using polynomial voltage-controlled source is validates for the DC simulation of the SG-MOSFET. Guidance lines for the low-voltage design of a SGMOSFET RF switch are detailed.

Official source

https://infoscience.epfl.ch/entities/publication/94eb1dfe-4ef5-4ae2-be9d-15ecc9b0d40e

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Mihai Adrian Ionescu, Philippe Renaud, Cyrille Hibert, Philippe Flückiger, Georges-André Racine
2001
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/94eb1dfe-4ef5-4ae2-be9d-15ecc9b0d40e

About this result

Related concepts (32)

MEMS

MEMS (Microelectromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.

Design

A design is a concept of either an object, a process, or a system that is specific and, in most cases, detailed. Design refers to something that is or has been intentionally created by a thinking agent, though it is sometimes used to refer to the nature of something. The verb to design expresses the process of developing a design. In some cases, the direct construction of an object without an explicit prior plan may also be considered to be a design (such as in some artwork and craftwork).

Capacitor types

Capacitors are manufactured in many styles, forms, dimensions, and from a large variety of materials. They all contain at least two electrical conductors, called plates, separated by an insulating layer (dielectric). Capacitors are widely used as parts of electrical circuits in many common electrical devices. Capacitors, together with resistors and inductors, belong to the group of passive components in electronic equipment.

Related publications (32)

The suspended-gate MOSFET (SG-MOSFET): A modeling outlook for the design of RF MEMS switches and tunable capacitors

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