Publication

Thin film pyroelectric array as a detector for an infrared gas spectrometer

Paul Muralt
1998
Journal Articles

Abstract

We demonstrate the implementation of a thin film pyroelectric array as a detector in an infrared gas spectrometer. The 1 x 50 element array is integrated onto a silicon chip with a sol-gel deposited zirconium modified lead titanate film (PZT) as the pyroelectrically active layer and a submicron membrane for thermal insulation. The spectrometer fitted with this detector covers a spectral range of 1.6 mu m and is capable of simultaneously detecting 15 ppm of CO2 and 200 ppm CO. Limitations of the present setup stem from a not optimized thermal light source and the discrete readout electronics. (C) 1998 Elsevier Science B.V. All rights reserved.

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https://infoscience.epfl.ch/entities/publication/9373c658-9b42-495c-9bac-e3ef55c6e9dc

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Paul Muralt
1998
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/9373c658-9b42-495c-9bac-e3ef55c6e9dc

About this result

Related concepts (32)

Infrared spectroscopy

Infrared spectroscopy (IR spectroscopy or vibrational spectroscopy) is the measurement of the interaction of infrared radiation with matter by absorption, emission, or reflection. It is used to study and identify chemical substances or functional groups in solid, liquid, or gaseous forms. It can be used to characterize new materials or identify and verify known and unknown samples. The method or technique of infrared spectroscopy is conducted with an instrument called an infrared spectrometer (or spectrophotometer) which produces an infrared spectrum.

Spectrometer

A spectrometer (spɛkˈtrɒmɪtər) is a scientific instrument used to separate and measure spectral components of a physical phenomenon. Spectrometer is a broad term often used to describe instruments that measure a continuous variable of a phenomenon where the spectral components are somehow mixed. In visible light a spectrometer can separate white light and measure individual narrow bands of color, called a spectrum. A mass spectrometer measures the spectrum of the masses of the atoms or molecules present in a gas.

Optical spectrometer

An optical spectrometer (spectrophotometer, spectrograph or spectroscope) is an instrument used to measure properties of light over a specific portion of the electromagnetic spectrum, typically used in spectroscopic analysis to identify materials. The variable measured is most often the irradiance of the light but could also, for instance, be the polarization state. The independent variable is usually the wavelength of the light or a unit directly proportional to the photon energy, such as reciprocal centimeters or electron volts, which has a reciprocal relationship to wavelength.

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Thin film pyroelectric array as a detector for an infrared gas spectrometer

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