Publication

Global visualization of powder trapping in capacitive RF plasmas by two-dimensional laser scattering

Christoph Hollenstein, Alan Howling, Jean-Luc Dorier
1996
Journal Articles

Abstract

Understanding particle dynamics requires comparison of spatially resolved measurements with two-dimensional (2-D) simulations, In this work, a cross section of a capacitive discharge is illuminated with an expanded laser beam, and global scattered light is recorded by camera, Plasma equipotentials are visualized using the scattered intensity from a small amount of particles trapped in an argon plasma. At low RF voltages, good agreement is found with 2-D fluid simulations, whereas displacement of the power clouds toward the sheaths is observed at high voltage.

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https://infoscience.epfl.ch/entities/publication/8b3373ef-799d-4103-a2a5-a8fd161a5a9f

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Christoph Hollenstein, Alan Howling, Jean-Luc Dorier
1996
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/8b3373ef-799d-4103-a2a5-a8fd161a5a9f

About this result

Related concepts (32)

Dielectric barrier discharge

Dielectric-barrier discharge (DBD) is the electrical discharge between two electrodes separated by an insulating dielectric barrier. Originally called silent (inaudible) discharge and also known as ozone production discharge or partial discharge, it was first reported by Ernst Werner von Siemens in 1857. The process normally uses high voltage alternating current, ranging from lower RF to microwave frequencies. However, other methods were developed to extend the frequency range all the way down to the DC.

Partial discharge

In electrical engineering, partial discharge (PD) is a localized dielectric breakdown (DB) (which does not completely bridge the space between the two conductors) of a small portion of a solid or fluid electrical insulation (EI) system under high voltage (HV) stress. While a corona discharge (CD) is usually revealed by a relatively steady glow or brush discharge (BD) in air, partial discharges within solid insulation system are not visible. PD can occur in a gaseous, liquid, or solid insulating medium.

High voltage

High voltage electricity refers to electrical potential large enough to cause injury or damage. In certain industries, high voltage refers to voltage above a certain threshold. Equipment and conductors that carry high voltage warrant special safety requirements and procedures. High voltage is used in electrical power distribution, in cathode ray tubes, to generate X-rays and particle beams, to produce electrical arcs, for ignition, in photomultiplier tubes, and in high-power amplifier vacuum tubes, as well as other industrial, military and scientific applications.

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Global visualization of powder trapping in capacitive RF plasmas by two-dimensional laser scattering

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