Publication

Silicon Nanowires Patterning by Sidewall and Nano-Oxidation Processing

2005
Posters

Abstract

The aim of this paper is to present a novel approach to pattern silicon nanowires for advanced electronics applications. A simple non-lithographic process was successfully developed to define sub-40nm diameter silicon wires and to connect them to test pads. Silicon nanowires can be used as basic functional blocks for applications that require typically low power and high density integration (single electron devices , silicon nano-wires , MEMS-like nano-scale structures ). The process flow described here is CMOS-compatible, which is an attractive feature for the future hybridization of micro/nanoelectronics.

Official source

https://infoscience.epfl.ch/entities/publication/7cd30867-4f00-4e61-a31d-7187d03acb0d

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2005
Posters

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/7cd30867-4f00-4e61-a31d-7187d03acb0d

About this result

Related concepts (32)

Nanowire

A nanowire is a nanostructure in the form of a wire with the diameter of the order of a nanometre (10−9 metres). More generally, nanowires can be defined as structures that have a thickness or diameter constrained to tens of nanometers or less and an unconstrained length. At these scales, quantum mechanical effects are important—which coined the term "quantum wires". Many different types of nanowires exist, including superconducting (e.g. YBCO), metallic (e.g. Ni, Pt, Au, Ag), semiconducting (e.g.

Nanoelectronics

Nanoelectronics refers to the use of nanotechnology in electronic components. The term covers a diverse set of devices and materials, with the common characteristic that they are so small that inter-atomic interactions and quantum mechanical properties need to be studied extensively. Some of these candidates include: hybrid molecular/semiconductor electronics, one-dimensional nanotubes/nanowires (e.g. silicon nanowires or carbon nanotubes) or advanced molecular electronics.

Nanoparticle

A nanoparticle or ultrafine particle is usually defined as a particle of matter that is between 1 and 100 nanometres (nm) in diameter. The term is sometimes used for larger particles, up to 500 nm, or fibers and tubes that are less than 100 nm in only two directions. At the lowest range, metal particles smaller than 1 nm are usually called atom clusters instead.

Related publications (3)

Silicon Nanowires Patterning by Sidewall and Nano-Oxidation Processing

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