AlScN thin films sputtering optimization

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Electrodeposition has been widely used to develop micro-mechanical devices because it offers high dimensional accuracy, flexibility, and relatively low cost. In devices such as mechanical watches, micro-components are required to be made from non-magnetic, hard, and wear-resistant materials. Copper is a common non-magnetic material used in the electrodeposition process, but its intrinsic low strength and soft mechanical behavior limit its use in such applications. These limitations can be overcome by devel

Common metal additive manufacturing technologies require intensive energy sources such as lasers to achieve the melting and bonding of a metallic feedstock. This leads to a sizeable carbon footprint especially for reflective materials such as aluminium. Moreover, it induces complex and turbulent melt pool dynamics leading to stochastic defect formation mechanisms that are hence difficult to suppress. We aim to propose an alternative approach similar to what is now practised on a large scale with thermoplast

This paper focuses on the fabrication and evaluation of vibration energy harvesting devices by utilizing an epitaxial Pb(Zr0.2Ti0.8)O-3 (PZT) thin film. The high quality of the c-axis oriented PZT layer results in a high piezoelectric coefficient and a low dielectric constant, which are key parameters for realizing high performance piezoelectric energy harvesters. Different cantilever structures, with and without a Si proof mass, are realized using micro-patterning techniques optimized for the epitaxial oxi

Novel, highly sensitive piezoelectric acoustic sensors based on partially unclamped Pb(Zr-x, Ti1-x)O-3 (PZT) coated cantilever and bridge have been fabricated by silicon micromachining. High sensitivity at low frequencies (5-100 Hz) has been achieved by patterning very narrow slits (3 to 5 mum) around the structures. A typical response of 100 mV Pa-1 and a noise equivalent pressure of 1.6 mPa Hz(1/2) at 20 Hz have been measured using a 10 pF charge amplifier. Stress compensation, dry etching and integration

Pb(Zr, Ti)O-3 (PZT) and Pb(Zr, Ti, Nb)O-3 (PNZT) thin films have been deposited on platinized silicon substrates by sputtering followed by a postannealing treatment. The Nb concentration in the films varied between 1 and 7 at. % with increments of 1 at. %. The effects of Nb modification on the piezoelectric response, and particularly on the longitudinal piezoelectric coefficient d(33), have been investigated. The introduction of Nb enhances the dielectric and piezoelectric properties of the PZT films. The b

The effective piezoelectric coefficient e(31) has been measured on sol-gel processed Pb(ZrxTi1-x)O-3 thin films with Zr concentrations ranging from 45 to 60%. The largest value was observed at 45% Zr, although dielectric constant and effective d(33) peak at 53% Zr. The findings suggest that the optimal composition for microactuators and sensors is less than or equal to 45% Zr, i.e., in the tetragonal part of the phase diagram.

The aim of this work was to investigate the degradation of the anti-adhesive properties of protective PTFE films during the hot embossing of thermoplasts, and to identify possible failure causes which reduce the lifetime of these films. A comparative XPS study of different deposited films and embossing parameters resulted in a better understanding of the film/polymer interactions at high temperatures. The loss of fluorine was found to be a major cause of the film quality degradation. It resulted from the di

Pb(Zr1–xTix)O3 thin films (x = 0.55 and 0.85) were prepared on fine grained, polished ZrO2 ceramic substrates by a sol-gel method. The high thermal expansion of ZrO2 relative to Si allows the preparation of thicker PZT films with reduced thermal stress. For the x = 0.85 films, this reduction of thermal stress gives a preference of (001) over (100) oriented domains. For x = 0.55 films, square P–E hysteresis loops were obtained with: Pr = 36 µC/Cm2, and Ec = 45 kV/cm, at a field of 160 kV/cm. Pyroelectric fig

Electrodeposition of magnetic multilayers was achieved in the cylindrical pores of a nuclear track-etched polycarbonate membrane. An assembly of wires with an average diameter of 80 nm and a length of 6 μm was obtained. Multilayers in these wires were grown by pulsed deposition of (Co, Ni) and Cu. The high aspect ratio of the sample allowed us to measure the magnetoresistance with the current perpendicular to the planes. Magnetoresistance ratios higher than 20% at ambient temperature are reported. © 1995.

Photoemission spectromicroscopy was used to investigate the electronic structure of TiO2 anatase single crystals and polycrystalline thin films. The stoichiometry and the degree of oxidation of as-grown crystals, as-deposited films, as well as of thermally annealed samples in different atmospheres, were analyzed, based on the Ti 2p and O 1s core levels, with an energy resolution of 0.4 eV. The experimental density of states (DOS) was found to be in agreement with the theoretical DOS reported in the literatu

AlScN thin films sputtering optimization

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Electrochemical deposition of composite materials: unravelling the process-structure-property nexus

Magnetic Field-Assisted Direct Liquid Metal Deposition

The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film

Piezoelectric Pb(Zr-x,Ti1-x)O-3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors

Evaluation of niobium effects on the longitudinal piezoelectric coefficients of Pb(Zr, Ti)O-3 thin films

In-plane piezoelectric coefficient of PZT thin films as a function of composition

Properties of thin anti-adhesive films used for the replication of microstructures in polymers

Sol-gel deposition of PZT thin films on ceramic ZrO2 substrates

Wire-shaped magnetic mutilayers for 'current perpendicular to plane' magnetoresistance measurements

Electronic-Structure of Anatase TiO2 Oxide