Publication

Micro-electro-mechanical capacitors based on vertical carbon nanotube arrays

Mihai Adrian Ionescu
2009
Conference Papers

Abstract

This paper explores the design and fabrication of Micro-Electro-Mechanical capacitors based on vertical carbon nanotube arrays. The devices are realized in vertically single-clamped parallel plate configurations using a dense array of vertically grown MWCNTs on metal lines. The capacitance tuning is performed by electrostatic actuation. From the pull-in voltage value, based on novel analytical model of single-clamped vertical CNT membranes, we extract an equivalent Young modulus of the CNT array ranging in the 10's of MPa. S-parameter measurements combined with an equivalent circuit model enable the demonstration of a capacitors with values of 50-200fF with a tuning range of the order of 19%. ©2009 IEEE.

Official source

https://infoscience.epfl.ch/entities/publication/69af42fe-24a0-4386-a356-b06013a083a0

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Mihai Adrian Ionescu
2009
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/69af42fe-24a0-4386-a356-b06013a083a0

About this result

Related concepts (27)

Capacitor types

Capacitors are manufactured in many styles, forms, dimensions, and from a large variety of materials. They all contain at least two electrical conductors, called plates, separated by an insulating layer (dielectric). Capacitors are widely used as parts of electrical circuits in many common electrical devices. Capacitors, together with resistors and inductors, belong to the group of passive components in electronic equipment.

Carbon nanotube

A carbon nanotube (CNT) is a tube made of carbon with a diameter in the nanometer range (nanoscale). They are one of the allotropes of carbon. Single-walled carbon nanotubes (SWCNTs) have diameters around 0.5–2.0 nanometers, about 100,000 times smaller than the width of a human hair. They can be idealized as cutouts from a two-dimensional graphene sheet rolled up to form a hollow cylinder. Multi-walled carbon nanotubes (MWCNTs) consist of nested single-wall carbon nanotubes in a nested, tube-in-tube structure.

Film capacitor

Film capacitors, plastic film capacitors, film dielectric capacitors, or polymer film capacitors, generically called film caps as well as power film capacitors, are electrical capacitors with an insulating plastic film as the dielectric, sometimes combined with paper as carrier of the electrodes. The dielectric films, depending on the desired dielectric strength, are drawn in a special process to an extremely thin thickness, and are then provided with electrodes.

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Micro-electro-mechanical capacitors based on vertical carbon nanotube arrays

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